The Model 6012, an automated 300mm mask aligner, is part of OAI's elite class of production photolithography equipment that is engineered with OAI's proven modular platform, better than 3% uniformity, and a thruput of 200 wafers per hour in 1st mask mode. It has all the features of OAI"s Model 6000 for production but is engineered for 300mm or 12". It is a flexible, affordable, and versatile tool that can handle 4" to 12 ". Please visit OAI at booth 1151 to discuss this product and learn about OAI's other products.