Amcoss GmbH

Feldkirch,  Austria
http://www.amcoss-systems.com

• Booth: 1140

Smart, individual & sustainable single wafer processing

Overview

amcoss GmbH, located in Feldkirch, Austria, is a hightech company in the semiconductor and microsystems technology business. The company manufactures highly specialised semi- and fully automatic single-wafer processing equipment for coating, developing, cleaning, lift-off, etching, tempering and HMDS of wafers and substrates. All these processes are exactly controlled by our process control software ams PILOT.

amcoss also offers engineering- and repair-services for optical, mechanical and mechatronic quality components for multiple applications and areas in the microchip production (photolithography, RTP, substrate coating, CVD, EPI and metrology). The company is the largest supplier for second source components for stepper optics in the world.

80% of all manufacturers of microchips and semiconductors worldwide, as well as best-known R&D organizations are our business partners.

amcoss was formed in 2008 and has since then been growing steadily. To enhance our business opportunities amcoss has been looking out for a strong partner and is now part of the LAB14 group based in Heidelberg, Germany, with approx. 1000 employees worldwide.

  Press Releases

• amcoss wafer processing equipment contributes to increase in productivity at Jenoptik in Berlin-Adlershof (Jun 19, 2023)

  A TOOL FOR HIGH THROUGHPUT AND VARYING WAFER DIAMETERS

  Feldkirch/Berlin. amcoss GmbH, based in Feldkirch, Austria, has supplied Jenoptik in Berlin-Adlershof with a fully automatic amc 2000 wafer processing unit for coating and developing of wafers. Being one of the leading manufacturers for high-power, edge-emitting semiconductor lasers, Jenoptik will use the equipment in lithography processes.

  “The amcoss equipment is a replacement tool. Our goal is to significantly increase capacity and yield, compared to the tool we have been using so far, which will noticeably raise productivity. Furthermore, we need optimized wafer centering and more flexible application possibilities for 3” and 4” wafers. With amc 2000 we are sure to reach these goals and to even increase quality and efficiency in wafer processing”, says Dr. Jürgen Sebastian, site manager of Jenoptik Berlin where high-power diode lasers for medical applications, materials processing, R & D and as pump sources for solid-state lasers are being produced.

  amcoss wafer processing equipment is configured according to individual customer needs and demands. Every tool is unique. “We do not build mass products, but each of our machines is a highly complex single piece. That is our strength,” explains company owner David Erne. “So, amc 2000 for Jenoptik has been designed for highest throughput. With its dual arm handler and 4 loadport stations for parallel operation of up to four processes, it absolutely is a high-throughput tool.” Besides a space-saving, integrated alignment-on-the-fly, a prealigner may be alternatively used, if flat- orientation were necessary.

  Utmost flexibility regarding wafer diameters and applications

  Another reason to decide for an amcoss amc 2000 equipment is its absolutely flexible layout. It is a veritable bridge tool. Jenoptik is now capable to simultaneousely process different wafer sizes – especially the necessary 3” and 4” diameters – without adaptations when changing to another size. By fitting the tool with 5 dispense lines with an innovative, unique single-nozzle-gripper system and an additional syringe, flexibility has increased even more. Various Hot- and Coolplates, a special Vapor Prime Hotplate and an efficient EBR system, top off the configuration.

  “We are very pleased, that a renowned company like Jenoptik has chosen us as their partner”, says David Erne. “The quality of their industry-leading diode lasers is based on most advanced manufacturing methods and process technologies, which we are delighted to support with our equipment and processes.”

  In addition to the new amcoss wafer processing tool, an amc 2500 equipment by amcoss has been installed at the Jenoptik site in Dresden. So, sustainable support for equipment in use, as well as synergies for longterm service are guaranteed.

  amcoss GmbH develops and manufactures completely customized fully- or semi-automatic processing equipment for coating, developing, temperature control and cleaning, as well as lift-off and etching of substrates and masks from a great variety of materials.

  Jenoptik with its division Light & Optics is a globally operating OEM supplier of system solutions and products based on photonics technologies. The company disposes of vast expert knowledge in optics, laser technology, digital image processing, opto-electronics and software. Under its brand name TRIOPTICS, Jenoptik offers optical measuring- and production systems for quality control of lenses, objective lenses and camera modules.

• Ferdinand-Braun-Institut in Berlin upgrades two amc machines with the amcoss ams PILOT process control software (Jun 19, 2023)

  AUTOMATED EXCHANGE OF DATA IS GUARANTEED

  Feldkirch/Berlin. Ferdinand-Braun-Institut, Leibniz-Institut fuer Hoechstfrequenztechnik (FBH) in Berlin has already been using two wafer processing systems for some time now, which are now being upgraded with the newly developed, highly convenient amcoss ams PILOT process control software.

  “A software for efficient surveillance and control of the manufacturing process, a so-called Manufacturing Execution System (MES), is currently being introduced at the Ferdinand-Braun-Institut (FBH) to further improve the quality and efficiency of processes and products. The system software from amcoss allows the automated, fast and secure exchange of system and process data with the MES software”, Dr Olaf Krüger explains, Process Technology Manager at FBH. This would not have been possible with the old machine control software that previously controlled the two systems. The upgrade with the modern and self-explanatory ams PILOT software from amcoss was, therefore, a logical and necessary step.

  With the ams PILOT software, FBH has gained a tool with a visually appealing, ergonomic and intuitive user interface. It scores with convenient features such as simple recipe development, integrated scheduling and uncomplicated updates to the latest Windows versions. In addition, the user management noticeably eases the daily work on the systems with several users. “Diverse service features and screens as well as the practical remote maintenance option ensure a high level of serviceability”, amcoss company owner David Erne explains, “and the integrated Energy Safe Mode saves energy and media, increases energy efficiency and conserves resources.”

  The ams PILOT is completely compliant with the E95-1101 semi-standard and can be extended with an optional SECS/GEM interface.

  amcoss equips all amc and amr systems built since 2020 with the ams PILOT software as a standard. Needless to say, all older systems already available on the market by amcoss can also be upgraded with ams PILOT to profit from its advantages and to be brought up to date software-technically. Since the software is platform independent, it can also be adjusted and upgraded to the machinery of other manufacturers at any time.

  For the best reproducibility

  Wafers, with the amcoss systems at FBH Berlin in the production of high-brilliance diode lasers, UV light-emitting diodes, microwave circuits and components for power electronics, are coated with electron beam and photoresists, and exposed wafers are developed. The use of automated technology ensures the highest quality and reproducibility as well as compatibility for industry partners.

  This project was partly funded by the German BMBF within the "Forschungsfabrik Mikroelektronik Deutschland (FMD)" framework under ref. 16FMD02.

  The Ferdinand-Braun-Institut GmbH, Leibniz-Institut fuer Hoechstfrequenztechnik (FBH) is one of the leading institutions for application- and industry-oriented research in microwave engineering and optoelectronics. It researches and realizes electronic and optical components, modules and systems based on compound semiconductors which are key elements for innovation in the social fields of communications, energy, health, and mobility.

  amcoss GmbH develops and manufactures, amongst others, customer-specific fully and semi-automated single wafer equipment for coating, developing, tempering, cleaning, as well as lift-off and etching of subtstrates and masks made of different materials.

  Products