● SIMATIC® controller with 7“ touch panel
● Vacuum up to 10-3 hPa (VPO-300-HV up to 10-6 hPa)
● Process gas line with Mass Flow Controller for Nitrogen
● overpressure up to 0,2 MPa
● Temperature up to 1000 °C (optional up to 1200 °C)
Application
● Implantation/Contact Annealing Annealing processes with or without vacuum up to 10-3 hPa/ 10-6 hPa. Easy profiling by using a SPS SIMATIC® controller with WIN based software.
Perfect lab tool and also for production on a low cost base. High production output. A remote control can be adjusted and the system can easily integrated into a production line.
● RTP, RTA, RTO, RTN
● Operation with inert gases, Oxygen, Hydrogen, Forming gas
● SiAu, SiAl, SiMo Alloying
● Low k dielectrica
● Crystallization & densification
● Si-Solar Wafer Cells on glass by Si-Wafer bonding Features
● Precise ramp up and fast ramp down rates
● Up to 4 gas lines (Mass Flow Controller)
● 3 heating zones programmable, heated by Infrared lamps
● 50 programs with 50 steps each
● Top and bottom heating (selection by Software) ● Small foot prin