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JEOL USA, Inc.

Peabody,  MA 
United States
http://www.jeolusa.com
  • Booth: 328

Overview

JEOL USA

Electron Microscopes, Ion Beam Milling, and E-beam Lithography tools. Renowned service and support.

Electron Microscopes

JEOL’s microscopy expertise spans more than 70 years. We offer a full suite of Scanning Electron Microscopes (SEM) from benchtop to ultrahigh resolution analytical systems, a special high throughput automated Scanning Transmission Electron Microscope (S/TEM) and a full suite of multipurpose, atomic resolution TEMs. We are pleased to introduce our all-new Focused Ion Beam (FIB)-SEM at Semicon. We also offer a cooled broad ion beam Cross Section Polisher.  

Lithography Tools

As the industry leader in direct write e-beam lithography, JEOL’s latest generation of tools will take you through several next-generation designs. JEOL has more than 50 years of experience in e-beam and mask writing tools.

Service and Support

JEOL USA has 13 regional service offices and more than 180 service engineers in the Americas.


  Press Releases

  • JEOL Introduces New FIB-SEM for Fast, Atomic Resolution STEM Sample Preparation

    JEOL has developed a new Focused Ion Beam (FIB) solution for preparation of specimens prior to observation in the Transmission Electron Microscope (TEM). The new JIB-PS500i is a multipurpose FIB-SEM that delivers the synergy of fast sample preparation, SEM imaging and EDS analysis in a single instrument.

    High Quality Fast TEM Sample Preparation

    The new FIB sample stage offers fast transitioning between processing and imaging, allowing for real-time feedback of specimen quality. With the ability to prepare samples thinner than 30nm, the FIB-SEM produces a sample suitable for superior atomic resolution imaging and analysis with STEM (Scanning Transmission Electron Microscope). A retractable STEM detector enables easy acquisition of bright field and dark field images during processing to precisely evaluate preparation of the TEM sample. The operator can easily prepare TEM specimens using the STEMPLING2 automatic TEM specimen preparation system, which allows unattended preparation of multiple samples.  A specially designed double-tilt sample holder, TEM-Linkage, enables seamless transfer from the FIB-SEM directly to the TEM.

    New Large Chamber/Stage for Ultimate Sample Preparation Flexibility

    A key advantage of the JIB-PS500i FIB is the large specimen chamber with an easy-access door. This design supports an efficient workflow and flexibility for a variety of samples and processes. The 5-axis full-eucentric large motor stage is designed to transport both large and multiple samples in the XY direction, and at a wide stage tilt and rotation range.

    New FIB Column with higher current and superior performance at low kV

    A new high current (up to 100 nA) FIB column is especially effective for large-area processing and analysis, which is ideal for semiconductor samples. The new FIB has high performance fine milling capabilities essential for quality lamella preparation imaging, EDS analysis, and 3D microscopy. The new JIB-PS500i has superior performance in the low kV range, as low as 0.5kV, essential for beam sensitive materials.

    Video and more information.


  Products

  • JIB-PS500i FIB-SEM
    Cutting-edge Focused Ion Beam system: The all-new JIB-PS500i is a multipurpose FIB-SEM that delivers the synergy of fast sample preparation, SEM imaging and EDS analysis in a single instrument....

  • The new JIB-PS500i is a multipurpose FIB-SEM that delivers the synergy of fast preparation of samples, high resolution SEM imaging, and EDS chemical analysis - all in a single instrument. A key advantage of the JIB-PS500i FIB is the large specimen chamber with an easy-access door. This design supports an efficient workflow and flexibility for a variety of samples and processes. The 5-axis full-eucentric large motor stage is designed to transport both large and multiple samples in the XY direction, and at a wide stage tilt and rotation range. 

    Learn more 

    Video: https://bit.ly/3W4J0ug

  • JEM-ACE200F Transmission Electron Microscope
    The JEM-ACE200F is a fully automated, high performance, high-throughput S/TEM optimally designed to meet the high volume demands of semiconductor device development, yield improvement and FAB manufacturing support....

  • The JEM-ACE200F is a fully automated, high performance, high-throughput S/TEM that meets the high volume demands of semiconductor device development, yield improvement and FAB manufacturing support. The ACE200F delivers fast, stable, and highly-resolved data acquisition for device characterization with high accuracy critical dimension measurements, atomic resolution imaging, and elemental analysis. Unattended operation. Superb stability and resolution.

    Learn More

    See the video here: https://bit.ly/42uQJUN

  • JBX-8100FS Direct Write E-Beam Lithography System
    The JEOL JBX-8100FS series spot beam lithography system writes ultrafine patterns at a faster rate of speed while minimizing idle time, especially during the exposure process, thus increasing throughput....

  • JEOL is the world’s top supplier of EBL systems. Since 1967, JEOL has been known as the manufacturer of a complete line of Electron Beam Lithography (EBL) systems. Applications range from mask/reticle production and nano-lithography research to ultrafine, direct write exposures for communication devices. We offer unsurpassed technical reliability, application assistance and service expertise. The JBX-8100FS delivers higher throughput and lower operating costs.

    Now JEOL’s new E-beam Metal Additive manufacturing system for 3D printing is a game changer for inventory control over the long lifetime of this direct write system. It allows OEMs to drastically reduce the inventory levels currently needed to store parts for multiple platforms over multiple product generations.  JEOL’s JAM-5200EBM can produce direct replacement parts in a choice of material including Ti64 and Pure Copper.  We’ve successfully built heat sinks, high vacuum chambers, and electron optics columns.  Building replacement parts, especially vacuum-related with Additive Manufacturing technology, results in parts without welds and the possibility of leaks, lower weights and stronger materials. 

    Learn More


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