July 12-14, 2016 Moscone Center San Fransisco, CA
ULVAC is a leading supplier of production equipment for the semiconductor, lithium-ion battery, FPD and solar cell industries. Semiconductor Products include the ENTRON Metallization System with PVD/CVD/ALD capability, the MEMS Release Equipment, etching systems for various applications including solutions for Panel Level Packaging, Wafer Level Packaging, LED, Power Device and Non-Volatile memory. Also on display will be vacuum components including the leak detectors, RGA’s and ellipsometers. An area of the booth will also feature our Solar Cell processing equipment. The systems and components are manufactured to RoHS compliance and are designed with innovative production technology for cost effective device fabrication. Systems range from R&D through full-scale manufacturing applications.
Main Features:
FEOL Device Applications: