Process Technology

SHX is a compact high-performance heater designed to safely heat isopropyl alcohol (IPA), meeting the most stringent cleanliness requirements to support next generation semiconductor node technologies.

The newest Process Technology inline solvent heater. SHX is a compact high-performance heater designed to safely heat isopropyl alcohol (IPA), meeting the most stringent cleanliness requirements to support next generation semiconductor node technologies. Chemistry contained within high-purity PTFE components – no contact with any metals. Supports recirculating and single pass flow requirements. This is the ultimate in high-purity solvent heating! Ask about our customized to your tool and explosion proof design (SHX-EX) options. Heats up to 194°F (90°C)

Best-in-class chemical heater

The TIH offers unmatched performance and reliability with the ability to heat a variety of chemicals. This heater is suitable for either single pass or recirculating applications. Delivers best-in-class performance over a wide range of flow and temperature requirements. The TIH is the most durable and long-lasting inline chemical heater available! Multiple plumbing layouts facilitate easy installation into a variety of tool configurations. Fluoropolymer (PTFE) surfaces protect from permeation. 

The ultimate in ultra-pure, deionized water heating

Complete Turn-Key System! Industry leading heating solution is an ultra-pure, ultra-reliable high purity water heater! Utilizing PTFE and PVDF wetted surfaces, the Lufran DI Series is the preferred and industry-leading heating solution for highly-critical semiconductor and flat panel display manufacturing processes. Featuring an advanced temperature control system and sizes up to 312kW, this is the ultimate in ultra-pure deionized water heating. Offers exceptional MTBF of ten years! Thousands of installations worldwide. Worldwide field service support. 99% energy efficient! Heats up to 194°F (90°C)