Thermo Fisher Scientific

Designed to be highly flexible, the Nicolet iS50 FTIR Spectrometer can be upgraded from a simple FTIR bench to a fully automated, multi-spectral range system that can acquire spectra from far-infrared to visible. You can initiate novel ATR, Raman, and NIR modules at the touch of a button, enabling access to these techniques without manually changing system components.

The Nicolet iS50 instrument can be uniquely configured for the analysis of silicon and other electronics components. Special designs permit handling of production wafers or smaller discs with various data collection patterns enabled. Applications for semiconductor research include the ability to analyze wafers up to 300 mm in diameter; various analysis patterns; carbon, oxygen, and epitaxial analysis methods (quantitative tools); and the analysis of 6” discs using purged accessories.

Perform routine continuous measurement of contaminants including water and oxygen to single-digit ppt levels with Thermo Scientific™ APIX/APIMS δQ and APIX/APIMS Quattro Ultra High Purity (UHP) Electronic Gas Analyzers.

These gas analyzers offer a cost effective alternative to conventional quality control techniques allowing each bulk gas to be monitored for a range of potential contaminants, while achieving lower detection limits (up to 100 times better) than any technology.

Benefits include: Reliable, fully automatic system for online quality control; Superior sensitivity with lower detection capability of <10 ppt provides gas analysis suitable for the most stringent quality requirements; Automatic switching and calibration; Fast online measurement enables immediate response to gas supply upset conditions; Industry standard communications protocol for plant control and integration.

The new Metrios 6 is a fully automated (S)TEM with improved precision data quality that delivers a 20% average productivity improvement compared to previous-generation metrology and defect analysis TEM’s.

The new Metrios 6 (S)TEM platform includes an entirely new stage, EDS subsystem, source technology and machine-learning enabled automation software.  The new Smart Stage provides fully automated sample loading and fast, precise navigation to the region of interest.  The Ultra-X EDS provides 2X faster elemental analysis and the new X-CFEG source and column enable robust and fast HT switching resulting in the highest (S)TEM data integrity and quality.  The entire system is controlled by recipe-free automation software which utilizes machine-learning algorithms to reduce set-up time for each new process or sample type.  This provides unprecedented ease-of-use and scalability to meet the TEM data demands of the latest generation of advanced semiconductor devices.