Rorze, leading provider of clean substrate handling products
Overview
Rorze, offers products ranging from robots, loadports, EFEM’s, wafer sorters, wafer stocker to advanced products such as Patented N2 purged wafer and reticle stocker & Patented N2 purged loadports and EUV handling systems. Rorze also has the capabilities to support OEM as one stop solution for total vacuum platform including manufacturing of load locks, custom vacuum robots, vacuum transfer module and process modules from low volume to high volume needs.
Rorze shutter type N2 Purged loadport is a new product from Rorze with patented technologies that is essential for any wafer fab with concern of the negative effects of humidity on process. A typical N2 purge LP consumes in exces of 200 LPM and still unable to get better humidity control beyond average of about 30% while Rorze LP can offer better than 2% humidity controlinside FOUP with 1/3 consumption of N2, even during load and unload sequencewith FOUP door open.
Contact sales at 510-687-1340 for your requirements.