KATON® PF90V is a peroxide curable Perfluoro-elastomer (FFKM) designed for high performance semiconductor manufacturing applications where both high purity and low particle generation are required.
Mineral fillers such as BaSO4, TiO2, SiO2, aluminum oxide and aluminum silicate exhibit high plasma resistance: they can therefore shield the polymer, but may contaminate the chamber by leaving discrete particles as soon as the polymer is etched by plasma. On the other hand, PTFE and FKMs have similar etching rates, so that polymeric filled compounds can be completely etched to form volatiles, significantly reducing the potential for particle generation.
The main properties of KATON PF90V are as follows：
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High purity (low amount of extractables)
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Good oxygen plasma resistance
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Very low particle generation
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Low out gassing
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Low permeability
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Low friction
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High abrasion resistance
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Low modulus
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Excellent mechanical and sealing properties
KATON® PF90V is a cost effective sealing material for applications at temperatures ranging from –20°C to 300°C; it was specifically developed for use in lower temperature and less chemically aggressive semiconductor processes, such as etch and physical vapor deposition(PVD), where lower particle generation is required. It is ideal as well for vacuum applications.
Its chemical resistance to mineral acids, dilute alkaline solutions, steam, aliphatic and aromatic solvents makes it suitable to Chemical Mechanical Polishing/Planarization (CMP) and wet etch (acid based) processes.
KATON® PF90V can be combined with the cure system and other typical Perfluoroelastomer compounding ingredients; its mixing can be accomplished with two roll mills or internal mixers. Finished goods may be produced by a variety of rubber processing methods. If only liquid curatives (peroxide and coagent) are added to the polymers during the compounding stage, translucent items are produced.
The primary use for KATON® PF90V is the manufacturing of any kind of elastomeric sealing element such as chamber seals, lid seals, window seals, gas inlet seals, fitting seals, slit valve gates, lip seals, wafer handling parts, CMP wafer handling parts, etc. used in the semiconductor and flat panel display manufacturing industry.
KATON® PF90V is marketed in the form of raw O-RING (1/PCS ) in order to give the suited to the final application.