SERVOMEX GROUP LLC

Designed to measure ultra-trace O2 to the very lowest levels, the DF-560E delivers the semiconductor industry an industry-leading 45ppt LDL. Flexible and adaptable, it is able to monitor O2 in multiple background gases while logging data in a variety of formats.

The DF-560E negates the effects of upset-prone applications, thanks to Servomex’s high-stability Coulometric sensing technology, which delivers a fast speed of response in the presence of sample and flow rate changes. With extended operational capabilities, the DF-560E offers automated maintenance, performs zero and span calibrations on a scheduled basis, or executes scheduled automatic checks and notifies users when calibration is needed.

The DF-760E is a dual moisture/oxygen analyzer for UHP gases.

Part of the latest Gen-7 series, the DF-760E delivers industry-leading quality control measurements for UHP bulk gases. Delivering a compact integrated solution for the simultaneous monitoring of trace moisture and trace oxygen, the DF-760E is an analyzer designed for monitoring UHP bulk gases used in the manufacture of integrated circuit boards.

Combining the industry-leading properties of Servomex’s non-depleting Coulometric sensor and robust Tunable Diode Laser (TDL) technology within a single compact unit, the DF-760E measures ultra-low contaminant levels of H2O and O2 within background gas blends of nitrogen (N2), hydrogen (H2), Helium (He), O2 and Argon (Ar) (H2O in O2 only). 

With the unique benefits of dual measurement capabilities, the DF-760E provides industry-leading Lower Detection Limits (LDL) of 100ppt for moisture and 45ppt for oxygen for a single solution to trace contaminant measurements. Offering:

• Broad detection         - The DF-760E performs H2O measurements in ranges from 0-20ppm to 0-2ppb min., and from 0-20ppm to 0-1ppb min. for O2 measurements.
• Minimal maintenance - The non-depleting Coulometric and TDL sensing technologies reduce ongoing costs, while zero sensor drift extends calibration intervals for the DF-760E.
• Easy to use               - Capable of operation through front panel or digital communication protocols, a single DF-760E can be used for dual measurements in a range of background gases.

The Chroma is a highly versatile, ultra-accurate trace gas analyzer
One of the most flexible trace gas monitoring solutions available to the market, the Chroma is optimized to specific background gases to ensure optimum performance for your application.

Offering a non-depleting Plasma Emission Detector (PED), Flame Ionization Detector (FID) and Thermal Conductivity Detector (TCD), the Chroma analyzer is one of the most versatile gas analyzers for trace gas measurement available. Most applications will be satisfied by a single 4U rack analyzer configuration, making the Chroma a compact, cost-effective solution for continuous process control or quality monitoring.

Chroma is a powerful solution for process control & quality monitoring, offering;

• Software optimization
• Easy to use for complex applications
• Safer, cost-effective measurements
• Unrivalled performance
• Flexible
• Benchmark compliance