Visit Booth 1540 for your exhaust gas abatement needs
Overview
CS CLEAN SOLUTIONS® is the global leader in dry-bed abatement systems for hazardous gas streams using passive, chemisorption-based technology to treat exhaust gas to outlet levels below TLV. Using proprietary granulate formulations, the systems operate at ambient temperature to abate toxic, corrosive and pyrophoric chemistries. Fuel gas, high voltage electrical power, water and acid waste neutralization are not required, providing extremely low operating cost with minimal maintenance and downtime compared to other abatement technologies. We also now offer our PCS TROPO and STRATO plasma-based PFC abatement device to reduce greenhouse gas emissions from etch processes. These PCS products do not have a water scrubber stage found in most burn/wet and plasma/wet abatement units. Additionally we offer a hybrid plasma system for Ammonia and Hydrogen abatement from GaN processes