ALIO Industries, LLC

With several patented designs for Planar and Nano Z® air bearing stages, ALIO is well-positioned for the next generation application demands of TRUE NANO® precision in semiconductor, deposition, lithography, and optical inspection applications.

ALIO’s patented 2-axis planar XY air bearing system has set the bar in the world of 6-D Nano Positioning®. As both axes use the same highly precise granite base as reference, advanced flatness of just a single micron over several hundreds of mm (or even meters) of travel ranges can be achieved.

ALIO’s linear X Air Bearing stages are characterized by being very smooth and accurate, and provide extremely straight and flat motion. Out extremely high motion fidelity Motion Systems are based on a planar air bearing design driven by linear motors. 

NANO Z® patented Z-lift air bearing stages overcome the legacy design issues associated with z-wedges and other vertical stages. They use a novel combination of air-bearings plus two voice coil motors in a compact footprint with up to 50mm travel.

When the highest rotational precision is required, manufacturers can choose from ALIO’s line of air bearing rotary stages.

Detailed Overview

Linear X Stages are probably the most common stages used in the precision industry, which is why it is not surprising that you can find ALIO’s linear X stages in nearly all precision applications.

Used in any kind of high precision application, ALIO’s enclosed, monolithic XY Stages utilize direct linear drives and high precision crossed roller bearings built into a compact 3-plate system. With nanometer straightness and flatness — as well as an optimized orthogonality — you can be assured that your point precision is True Nano®.

ALIO’s open-centered, monolithic XY stages are characterized by large apertures enabling usage in any kind of application requiring accessibility of the carried product from all sides.

If you require different travels in x and y, need a low-profile solution to avoid space constraints, and can’t compromise on performance and precision, there are hardly any off-the-shelf products on the market. Still unique in the market, one of ALIO’s asymmetrical, monolithic XY stages can help solve this complex combination of motion requirements.
 

ALIO’s standard rotary stage family uses crossed roller bearings in combination with frameless torque motors. These stages can handle applications where the mass, acceleration, or simply throughput needs are extreme, while still maintaining nanometer-level precision performance. 

Stages with angular contact bearings are addressing the need for very compact, flat, rotary stages for applications that require a small aperture.

When the highest rotational precision is required, manufacturers can choose from ALIO’s line of air bearing rotary stages. Air bearings allow the stage to move without mechanical contact and therefore movement is frictionless and without wear.

Large open center rotational stages - This type of rotary stage utilizes a tangential linear direct drive with angular contact bearings. The result is a family of stages with up to +/-7.5 degrees angular movement, a very low profile, and an extreme aperture for maximum accessibility from both sides. As even 12-inch wafers can fit into the aperture, it is not surprising that this stage is getting increasingly common in applications in the semiconductor industry.