Loading...

Frontier Semiconductor

Milpitas,  CA 
United States
http://www.frontiersemi.com
  • Booth: 5441

FSM offers a range of advanced metrology products/solutions

Overview

FSM solutions for:

Product Inline Inspection

Application Development

1. Film Stress Metrology

Global Stress

FSM 128 Series

Room Temperature Wafer Film Stress

FSM 500 Series

Wafer Film Stress Measurement up to 500°C FSM 900 Series

Wafer Film Stress Measurement and Material Characterization up to 900°C in Vacuum

2. Wafer & Film Thickness Metrology

FSM 413

Wafer Thickness, Total Thickness Variation, Through- Silicon Via, Roughness, Thin- film Thickness,

(TTV for ultra thin wafer: Taiko wafer)

FSM 125 RAFT

Thickness in Nanometer Range

Sample Transparent Film Thickness Measurement Film should be ticker than 1um

3. Electrical Tester

Non-contact Electrical Tester for Sheet Resistance, Leakage Current and Photo-Voltage

Contact Electrical Tester FSM 4 Point Probe

Contact Electrical Tester for Sheet Resistance Mapping

4. Material Characterization

FSM 900TC-VAC Stress, Thermal Desorption Spectroscopy, Reflectivity, Shrinkage, CTE optimization study, 4-point probe option for sheet resistance,

FSM 901TC-VAC Thermal Desorption Spectroscopy

FSM AquaFlex (4 Point Bend) Measure Adhesion Forces Quantitatively

FSM Laminar Measure Adhesion Forces Qualitatively


Send Email

Type your information and click "Send Email" to send an email to this exhibitor. To return to the previous screen without saving, click "Reset".