KSM Vacuum Products, Inc. | KSM USA | KSM Co., Ltd.
Overview
For 40+ Years KSM has custom designed & manufactured Critical Vacuum-Seal & Heating Products for UHV / Semiconductor Equipment. Key strategic supplier to global leading SEMICONDUCTOR OEM’s (WFE, Solar + Flat Panel Display Markets).
- Welded Metal Bellows
- Pedestal Heaters (SST, Aluminum, Ceramic)
- SiC Fine Ceramics (Silicon Carbide)
- Mechanical Seals
From prototypes to 10,000 piece production orders. Capacity to meet ramp up industry demands. Extensive cleanroom-controlled campus facility. Housing the World’s Largest ISO 6 Clean Room dedicated to Welding and Assembly of Metal Bellows Assemblies. Fully equipped with in-house Automated Cleaning Systems & Metallurgical Test Labs.
Our products are precision-engineered into every step of the wafer manufacturing process- These Bellows & Higher Assemblies employed in extreme temperature + high-purity vacuum environments.
PROCESS: Crystal Growing | Ion Implant | Etch | CVD | MBE | CMP | Lithography | Inspection | Display +
APPLICATION: Flexible Coupling | Crucible Lifts | Feedthrough | Flex-Connector | Pin Lift | Cassette Elevator | Door Valve Loadlock | Vibration Damper +