Rapid Thermal Process & Direct Liquid Injection CVD systems
Overview
With systems installed in 44 countries Annealsys is a leading manufacturer of Rapid Thermal Processing (RTP and RTCVD) and Direct Liquid Injection Deposition (CVD and ALD) systems. We are supplying number of companies for the manufacturing of MEMS, sensors, optoelectronics, telecommunication, power and discrete devices. Many famous laboratories worldwide are using our machines for the development of future semiconductor, photovoltaic and nanotechnologies components.
We are pushing the limits of rapid thermal annealing with :
- Cold wall chamber technology
- High temperature (2000°C)
- High vacuum capabilities
- Fast cooling solutions and pulse annealing mode for processing thermally sensitive substrates.
The Direct Liquid Injection deposition tools have been developed for deposition of metals, oxides and 2D materials. These systems use the widest range of organometallic chemicals like low vapor pressure and thermally unstable precursors.
Our philosophy involves building up a long-term relationship with our customers, providing high reliability and high quality tools, insuring low cost of ownership and offering outstanding customer support.