Robots and Design Co., Ltd.

Introducing Robots and Design's wafer handling modules! 

We are expert in transfer robot for semiconductor process tools and also, provide the related module such as SMIF, aligner and FOUP Opener. 

This wafer handling modules consist of 1 of Dual arm WTR with vacuum grip method, 1 of Pre-aligner finding the notch or flat zone with CCD scanning, and also having compatibility of both 8 & 12 inch wafer handling, 1 of SMIF handling the 8" POD, and finally 1 of FOUP opener handling the 25slots of FOUP for 12" wafer.   

You can get the WTR as well as related module from sole company - Robots and Design! 

Introducing of our Aligners! 

1) CCD ALIGNER (XYR TYPE) : Handle 8 & 12 inch of opaque wafer without mechanical change. Detect the notch or flat zone with CCD sensor and align the wafer as designated angle. 

2) CCD ALIGNER (XZR TYPE) : Handling 2 through 8 inch of wafer. Transparent, Translucent, and opaque wafer. Detect the notch or flat zone with CCD sensor and align the wafer as designated angle. 

3) Edge Grip Aligner : Handle 12 inch of opaque wafer exclusively. Grip the wafer edge and detect the notch with through-beam sensor. 

Other options are avaiable - teflon coating on chuck or pins, vacuum pad for compensation of wafer warpage, etc.