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Highvac Corporation

Colorado Springs,  CO 
United States
http://www.highvacgroup.com
  • Booth: 5855

Please come meet us and see our products at booth #5855

Overview

HIGHVAC Corp. - Vacuum and Abatement Solutions

HIGHVAC  is a solutions provider focusing on semiconductor dry vacuum pumps and point of use abatement systems.

Please visit HIGHVAC at booth #5855 to see our EcoGuard™ burn-wet abatement system, HANBELL dry screw vacuum pump technology, and TRAPPACK Particle Traps. Choose HIGHVAC for our extensive semiconductor industry experience, personalized service, and innovative solutions.

ECOGUARD™ SGS is the first PoU abatement system that maintains complete separation of multiple chamber gas streams through the entire burn-wet process. This technology provides specific advantages for destruction of Fluorinated Green House Gases (F-GHG) and provides solutions for reducing overall Global Warming Potential (GWP) output.

HANBELL Vacuum Technology offers innovative, dry-screw, high-vacuum roughing pumps that feature robust and energy efficient screw designs with power saving electronics.

TRAPPACK utilizes an innovative electro-static filter technology which enables increased life cycle and minimal conductance loss compared to conventional filter designs.


  Products

  • Vacuum and Abatement Solutions
    HANBELL manufactures dry-screw, high-vacuum roughing pumps that feature robust & energy-efficient design. ECOGUARD™ SGS is the first PoU abatement system that maintains complete separation of multiple chamber gas streams through the burn-wet process. ...

  • HANBELL Vacuum Technology has adopted the harsh duty proven technology from its industry leading PD series
    vacuum pumps into the iPH series semiconductor rated pumps. The iPH series pumps feature the latest in controls
    with up-to-date SEMI E73 interface standard. Other features that enhance the capabilites of these pumps in harsh duty
    applications include:

    • Short gas path
    • Integrated N2 Heater
    • Power saving VFDs
    • Idle mode (green mode)
    • Advanced temperature control
    • Multiple internal coating options

    Hanbell pumps provide both increased lifecycle and decreased cost of ownership. These factors combined
    with a highly competitive lead time make Hanbell an excellent choice. Highvac and Hanbell have forged a strong
    working relationship to deliver this combination of service and quality to the North American market.

    Patented ECOGUARD™ SGS Series Ideally suited for cluster tools with RPC

    • Maintains complete separation of multiple chamber gas streams
    • Available with 1, 2, 3, or 4 inlets
    • PFC DRE > 99% *CF4 > 90%
    • NH3 DRE > 99%
    • Patented technology
    • One to four inlets
    • Complete separation of multiple chamber gas streams
    • Burn/Wet System
    • Two stage water scrubber
    • Fresh water final stage
    • Siemens PLC
    • Touch Panel Interface
    • Ideal for RPC
    • Reduced downtime
    • Minimal Consumables
    • Ease of maintenance

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