Thermcraft, Incorporated

Winston Salem,  NC 
United States
http://www.thermcraftinc.com
  • Booth: 5148

Welcome to Thermcraft. Your thermal processing source!

Overview

Semiconductor Heating Elements

Thermally Engineered Replacement Heating Elements for Diffusion, Atmospheric and LPCVD Furnace Systems, for all OEM’s

Thermcraft has been supplying high quality diffusion furnace heating elements to the semiconductor industry since 1976. Using knowledge gained from all facets of thermal engineering, Thermcraft designs high performance elements for the most demanding processes. All elements are available in both vertical and horizontal configurations, as retrofits or for new applications, with temperature offerings up to 1300°C.. Rapid delivery and off-the-shelf pricing make these elements the cost-effective solution for your heating needs. 

All diffusion heating elements are available in two variations. Our Duracraft™ heating elements are heavy gauge wire type elements, similar to most standard diffusion heating elements. Also available are our Fibercraft™ low mass vacuum formed ceramic fiber heating elements.

Diffusion element accessories including standard and custom sized vestibule blocks are available as well as diffusion furnace collars and discs.


  Products

  • Duracraft™ Heavy Gauge Diffusion Heating Elements
    The Duracraft™ design incorporates helically wound heavy gauge conventional wire or Kanthal™ APM powdered-metal wire. The addition of self-locking ceramic spacers increases consistency and reliability under fluctuations of repeated temperature cycling....

  • The Duracraft™ design incorporates helically wound heavy gauge conventional wire or Kanthal™ APM powdered-metal wire. The heavy gauge wire enables higher temperature operation. The addition of self-locking ceramic spacers increases consistency and reliability under fluctuations of repeated temperature cycling. Upgrading to Kanthal™ APM powdered-metal wire allows for the highest temperature operation, large temperature swings and longer element life.

    For:

    • Highest Temperature Operation
    • Large Temperature Swings
    • Longest Life

    DCHT-500 furnace elements deliver dependable performance and long life even at the highest processing temperatures. Self-locking spacers and superior element design reduce the possibility for element sag. Like the DC1300, power is balanced between center and end zones, providing precise temperature uniformity at varied temperatures while reducing heat loss. The DCHT-500 includes heavy gauge, Kanthal™ APM powdered-metal heating wire for the longest life available and decreased element sag.

    The DCHT-500 is a must for well drive, field oxidation, LOCOS, and other long, high-temperature processes.

    The Benefits of Kanthal™ APM Powdered-Metal Wire
    Kanthal™ APM powdered-metal wire increases the overall effectiveness of a heating element in high temperature applications. At 1100°C, powdered metal wire lasts twice as long as conventional heating element wire. At lower temperatures, the difference is even greater. At high temperatures, powdered-metal wire also shows superior resistance to sagging. The chart shows relative sag between conventional-alloy heating elements and powdered-metal elements. Powdered-metal wire also has a higher tolerance to corrosive atmospheres, making it a better choice for processes employing HCI

  • Fibercraft™ Low Mass Diffusion Heating Elements
    The Fibercraft™ design incorporates helically wound flat ribbon, conventional wire or powdered-metal wire that is embedded in the vacuum formed ceramic fiber heating element insulation....

  • The Fibercraft™ design incorporates helically wound flat ribbon, conventional wire or powdered-metal wire that is embedded in the vacuum formed ceramic fiber heating element insulation. By using this unique construction, Fibercraft™ elements more than triple the effective radiating surface. The result is maximum heat dissipation, lower operating costs, decreased thermal response time, and improved temperature uniformity.

    For:

    • Low Temperature Operation
    • Rapid Thermal Response

    Ideal for LPCVD and thin oxidation processes, the Fibercraft FC-200 provides fast recovery and rapid cool down rates. These low-mass elements give you repeatable performance. Unique thermal engineering is used to increase the radiating surface, extending element lifetime. Available with heater surfaces coated black.

  • Vertical Semiconductor Heating Elements
    Vertical diffusion heating elements are available as completely new units or Thermcraft can remanufacture/rebuild your existing unit. Both the Fibercraft™ and Duracraft™ heater designs can be incorporated into new or existing vertical units....

  • Vertical diffusion heating elements are available as completely new units or Thermcraft can remanufacture/rebuild your existing unit. Both the Fibercraft™ and Duracraft™ heater designs can be incorporated into new or existing vertical units. There are two options available when dealing with existing failed units; Thermcraft will manufacture a new heater coil for your existing failed unit and ship it to you to install, or you can ship your existing failed unit to Thermcraft and we will take care of the entire remanufacture/rebuild process for you and ship it back ready to use.

    Fibercraft™ low mass vacuum formed heating elements or Duracraft™ heavy gauge helically would wire elements can be incorporated into new or existing units.

    Insulation:

    Light weight ceramic fiber insulation

    Shell:

    Stainless steel inner liner, aluminum outer shell with water jacket cooling


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