ULVAC, Inc.

Methuen,  MA 
United States
http://www.ulvac.com
  • Booth: 733

Welcome to ULVAC eBooth

Overview

ULVAC is a leading supplier of production equipment for the semiconductor, lithium-ion battery, FPD and solar cell industries. Semiconductor Products include the ENTRON Metallization System with PVD/CVD/ALD capability, the MEMS Release Equipment, etching systems for various applications including solutions for Panel Level Packaging, Wafer Level Packaging, LED, Power Device and Non-Volatile memory. Also on display will be vacuum components including the leak detectors, RGA’s and ellipsometers. An area of the booth will also feature our Solar Cell processing equipment. The systems and components are manufactured to RoHS compliance and are designed with innovative production technology for cost effective device fabrication. Systems range from R&D through full-scale manufacturing applications.

  Products

  • ENTRON-EX2 W300
    This multi-chamber cluster is ULVAC's latest platform for PVD processing having extendibility for high throughput in advanced logic, memory & analog nodes. HVM-ready for deposition of dielectrics & metals with in-situ cleaning capability....

    • Main Features:

    • Flexible module configuration with 400 plus track record in memory, logic & analog HVM wafer processing globally
    • Process capability for not only Si devices but also compound semiconductor, on quartz devices, etc.
    • 10 process modules maximum can be equipped based on cluster tool design desired
    • Single or Tandem platform is available with low carbon footprint & fab safety certifications for HVM

    FEOL Device Applications:

    •EUV/Multi-patterning HM
    •Novel channel materials
    •Source-Drain Contact
    •Bitline/wordline
    •Stress tuning spacers
    BEOL Device Applications:
    •Trench/Via metallization
    •Low resistance metals
    •Thick capping layers
    •MIMCap stack
    •TaN/Cu Barrier/Seed
    •Pad/RDL
    •Hybrid bonding interconnects
    Check here for more info: www.ulvac.com/systems/PVD/PVD300mm/PVD300ENTRONEX2 
  • HELiOT 900 Helium Leak Detector
    The ULVAC HELiOT 900 offers the highest pumping speed with an easy-to-use tablet interface so you can find smaller leaks, faster....

    • The HELiOT 900 Delivers:
    • Highest helium pumping speed
    • Wireless 7” touchscreen
    • Simple, intuitive operation
    • Easy maintenance
    • Five models to choose from

Categories

1 FLEX
  • Advanced Packaging
  • Power & Batteries
    • 101 Photovoltaic Device Manufacturing
  • PV: Stand-Alone Systems
    • 201 Flat Panel Display Equipment
  • Alignment Film Coating Equipment
  • Anodic Oxidation Equipment
  • Color Pattern Processing Equipment
  • Luminous Layer Patterning and Sealing Equipment
    • 202 Other Equipment
  • Molding; Encapsulation; Decapsulation Equipment
  • Vacuum drying & out gassing Systems
    • 203 Inspection & Measurement Products
  • Film Thickness; Uniformity Measurement; Ellipsometer
  • Leak Detection Systems - Vacuum or Gas
  • Metrology; Topology; Nanotopography; Flatness; Cryst.Orient.
  • Thermal Sensing, Measurement, Analysis
    • 204 MEMS Equipment
  • Deep RIE etching; Dry Etching
    • 205 Nanotechnology Equipment and Tools
  • Equipment, Nanotechnology Tools
    • 206 PV Equipment
  • Inspection and Metrology
  • Integration and Automation
  • Thin Film
  • Wafers
    • 207 Process Equipment
  • Bumping Systems
  • Deposition; (CVD, PVD, ALD, Plating)
  • Deposition; PVD; Sputtering; Evaporation Equipment
  • Epitaxy Equipment
  • Etching; Stripping; Ashing - Dry and Wet Equipment
  • Ion Implantation Equipment
  • Thermal Processing
    • 300 Packaging and Assembly Materials
  • Thin Film; Dielectric Film Materials
    • 307 Process Materials
  • Deposition/Target Materials
    • 400 Components, Parts & Accessories
  • Vacuum Systems Components and Accessories
    • 401 Sub-systems
  • Pumps, Vacuum

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