Precision-Engineered Heated Components for Wafer Processing
Overview
Cast Aluminum Solutions (CAS) designs & manufactures precision-engineered heated components for semiconductor equipment OEMs and end-users worldwide. We specialize in-chamber components and specialized liquid & gas heaters for wafer processing applications.
CAS is a leading supplier of high-uniformity, high-temperature Pedestal Heaters. Advanced options include Multi-Zone Heating, Embedded Cooling Tubes, Integrated Gas Channels, and Precision Surface Finishes.
With a robust New Product Development Team and newly-expanded R&D Technical Center, CAS develops, tests and prototypes customer-proprietary components with unique geometries, specialized heating profiles, and specific performance characteristics.
CAS also makes innovative heaters for process gases, carrier gases, solvents, DI water, and process chemicals.
We offer Finite Element Analysis, CFD Modeling, Infra-Red Imaging, Life-Cycle Testing, and Vacuum Chamber performance evaluations.
Headquartered in Northern Illinois, CAS serves customers globally via support offices in North America, Europe and Asia.
At Semicon West 2023, visit CAS at Booth 234 !