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Polyteknik AS

Oestervraa,  Denmark
http://www.polyteknik.com
  • Booth: 6065

Welcome to POLYTEKNIK AS - When Thin Film Matters!

Overview

Polyteknik AS is a European based PVD equipment manufacturer with an innovative and best service approach. With more than 25 years in business, a global reference list, and an excellent platform of technology, Polyteknik AS has turned to be an appreciated partner in the thin film industry.

Since the first PVD system was sold in 2007, the company's technology platform has moved from small scale R&D bacth systems to industry proven Flextura 200 and Flextura 300 Cluster systems. At the same time a market leading GLAD (glancing angle depostion) process module for volume production has been introduced.

We are the best choice for you, when your thin film matters.


  Products

  • Flextura 200 Cluster
    The Flextura 200 Cluster platform is probably the most flexible 200mm cluster tool available. Proven reliable wafer handling by Brooks MAG LEAP robot, cassette-to-cassette processing – SEMI standard cassette or custom cassette for even more flexibility....

  • CLUSTER PLATFORM HIGHLIGHTS 

    • Process frame for epitaxial growth of thin films at elevated temperatures up to 1000°C
    • Glancing angle deposition on wafers in volume production
    • Dynamic in-situ feedback control by PEM or RGA in reactive sputtering
    • Electrostatic chuck (ESC) with backside gas for substrate cooling or heating, RF/DC bias option
    • P-chuck – pneumatic chuck with edge clamp
    • Remote Plasma Sputtering technology
    • SECS/GEM, Direct SQL server logging
    • Market leading process software technology for accurate real time control of deposition
    • Bridge tool – from R&D to 200mm wafers – standard SEMI or custom cassette 

    SPUTTERING MODULES 

    The Magnetron Sputtering modules of the Flextura PVD platform handles sputtering processes from well-known standard metallisation or electrode layers to reactive sputtering of highly c-axis oriented and low stress AlN, TCO’s or even ternary alloys.

    • Direct planar sputter module
    • Confocal sputtering
    • Multiple magnetrons
    • Multilayers in one module
    • Co-sputtering
    • Linear sputtering
    • Single or dual magnetrons
    • Planar or rotatable setup
    • HiPIMS sputtering module
    • High aspect ratio metallisation
    • Layer property tuning
    • DC, pDC, and RF, Bipolar magnetron sputtering
    • Reactive and nonreactive sputtering

    GLANCING ANGLE DEPOSITION

    The Flextura GLAD module is a production proven glancing angle evaporation module for industry scale volumes with fully automated substrate handling from cassette. Fully compatible with standard top-down processing ensuring fast and direct integration with complementary processes like degas, etch or sputtering.

    Proven up to 200 mm diameter substrates
    Rotation: 0-40 rpm, tilt: 0-180°, resolution 0.1°
    GLAD stage with water cooling, ESC, or pneumatic chuck
    Special ebeam crucible with 12x60cc pockets
    Automatic pellet feeder option
    Low base pressure <5E-8 mbar
    SECS/GEM, MES direct SQL server logging

    Proof of concept or contract R&D available for 100 mm!


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