Loading...

Robots and Design Co., Ltd.

Yongin-si, Gyeonggi-do,  Korea (South)
http://www.rnd.re.kr
  • Booth: 5755

Robot expert for Semiconductor/LCD/FPD.

Overview

From our foundation in 1999, we lead the localization and manufacture of wafer transfer robot for semiconductor process tool. Through our continuous research and development, we provide the customized product in accordance with customer’s requirement.

Developing more than 200 types of robot based on our own technologies and over 20 years of accumulated experience, we established the full product line-up for robots used from front-end to back-end process.

We also provide the robots for industrial, educational and service use. With our technical basis of robot, we now expand our business to bio, Medi-bio device and dental milling system and spread our products to domestic as well as overseas partners.

With the value of customer satisfaction as a top priority, we aim to become a global company in robot beyond Korea.


  Products

  • Wafer Transfer modules
    Find out the standard type of WTR, FOUP opener, Aligner and SMIF from our wafer transfer modules. We provide various type of WTR and other modules to meet the customer's requirement....

  • Introducing Robots and Design's wafer handling modules! 

    We are expert in transfer robot for semiconductor process tools and also, provide the related module such as SMIF, aligner and FOUP Opener. 

    This wafer handling modules consist of 1 of Dual arm WTR with vacuum grip method, 1 of Pre-aligner finding the notch or flat zone with CCD scanning, and also having compatibility of both 8 & 12 inch wafer handling, 1 of SMIF handling the 8" POD, and finally 1 of FOUP opener handling the 25slots of FOUP for 12" wafer.   

    You can get the WTR as well as related module from sole company - Robots and Design! 

  • Aligners
    Do you find the aligning solution? See the Robots and Design's aligners. We have 3 different types of aligner - 2 CCD scanning differing from handling materials, 1 edge Gripping....

  • Introducing of our Aligners! 

    1) CCD ALIGNER (XYR TYPE) : Handle 8 & 12 inch of opaque wafer without mechanical change. Detect the notch or flat zone with CCD sensor and align the wafer as designated angle. 

    2) CCD ALIGNER (XZR TYPE) : Handling 2 through 8 inch of wafer. Transparent, Translucent, and opaque wafer. Detect the notch or flat zone with CCD sensor and align the wafer as designated angle. 

    3) Edge Grip Aligner : Handle 12 inch of opaque wafer exclusively. Grip the wafer edge and detect the notch with through-beam sensor. 

    Other options are avaiable - teflon coating on chuck or pins, vacuum pad for compensation of wafer warpage, etc. 


Send Email

Type your information and click "Send Email" to send an email to this exhibitor. To return to the previous screen without saving, click "Reset".