1. Comet Vacuum Capacitors: Combining Expertise and Technology
Get to know the latest generation of Comet Vacuum Capacitors with higher power density that address more sophisticated applications and production processes for customers. Find the broadest selection of capacitance, power, voltage, and drive systems in the market.
2. Comet RF Power Delivery Platform Synertia®
Synertia® is the RF power system that ensures powerful command and control of plasma conditions at highest speed level. The Synertia® platform consists of RF Generators and RF Matching Networks with a wide range of frequencies and power levels.
Synertia® allows to manage the complexities of multi-layer next-generation memory and atomic-scale plasma processes. The unique, patented controls of Generator and Matching Network interact at highest possible speeds. These actionable insights enable more complex plasma applications than have ever been possible before.
2.1 RF Power Generator Synertia® RFG
Users fully control the unique performance accelerators of Synertia® RF generators, including:
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Multilevel pulsing that is tunable and highly configurable to deliver precise and repeatable control of the plasma.
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Consistent performance over millions of process steps.
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Advanced visualization of critical measurement and control parameters. This enables acceleration of process optimization and speeds time to solution. A wide variety of smart data sets for debugging, troubleshooting, and targeted analytics.
Higher yield is the result of Synertia®’s fast and agile process control, which delivers superior repeatability, faster tuning, and custom wave-shaping.
2.2 Matching Network Synertia® RFM
Comet offers a full range of industry leading matching network solutions. Profound know-how in RF circuit modeling and design combined with outstanding Comet vacuum capacitors guarantees highest performance, repeatability and reliability of your tools.