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Harmonic Drive LLC

Beverly,  MA 
United States
http://www.harmonicdrive.net
  • Booth: 861

We look forward to seeing you!

Overview

Harmonic Drive is a world leader in the design, development and manufacturing of zero-backlash motion control products. Our servo-actuators, gearheads, and gear components achieve accuracy better than 30 arc-seconds and repeatability of +/- 5 arc-seconds. A wide variety of standard and customized designs are available to meet the high precision requirements of semiconductor manufacturing equipment and robotics. Application engineers with expertise in motion control are available to assist you with your concept and detailed designs, free of charge. Harmonic Drive® products are used extensively in wafer and flat panel transfer robots as well as CMP and ion implant equipment. Our products provide the highest torque density of any product in its class and are available in sizes ranging from 13mm to 330mm in diameter. Our US Headquarters and manufacturing facility in Massachusetts, is ISO 9001 and AS9100 registered and produces the majority of products we sell.


  Products

  • SHA with Integrated Servo Drive
    This revolutionary product eliminates the need for an external servo drive and greatly simplifies cabling yet delivers high-positional accuracy and torsional stiffness in a compact housing....

  • The SHA-IDT Series is a family of compact actuators that deliver high torque with exceptional accuracy and repeatability. These hollow shaft servo actuators feature Harmonic Drive® precision strain wave gears combined with a brushless servomotor, a brake, two magnetic absolute encoders and an integrated Servo Drive with CANopen® Communication. 
  • FHA Integrated Drive
    The FHA-C mini Series is a family of extremely compact actuators that deliver high torque with exceptional accuracy and repeatability....

  • As part of the FHA-C mini family, an integrated servo drive version utilizing CANopen® communication is now available. This evolutionary product eliminates the need for an external drive and greatly improves wiring while retaining high-positional accuracy and torsional stiffness in a compact housing. This new mini actuator product is ideal for use in robotics.

    Since it communicates via CANopen, only 4 conductors are needed: CANH, CANL, +24VDC, 0VDC. A single-turn 14bit (16384 cpr) gear output sensing encoder has been integrated along with a single-turn 15bit (32768 cpr) motor input sensing encoder providing a true absolute encoder that does not require a battery within 360° of rotation of the output. Typical multi-turn encoders monitoring the motor input shaft require a battery to store the current position when power is lost to the system; however, the dual absolute encoders overcome this need. In other words, No Battery Required. When power is restored, the actuator knows its position.

  • RSF-5B IDT Supermini Actuator
    The compact RSF-5 miniature actuator with a zero backlash Harmonic Drive® gear delivers high torque with exceptional accuracy and repeatability....

  • The actuator features an integrated servo drive utilizing CANopen® communication. This evolutionary product eliminates the need for an external drive and greatly improves wiring while retaining high-positional accuracy and torsional stiffness in a compact housing. This new miniature actuator product is ideal for use in robotics.

    Since it communicates via CANopen, only 4 conductors are needed: CANH, CANL, +24VDC, 0VDC. A single-turn 14bit (16384 cpr) gear output sensing encoder has been integrated. See also FHA-IDT for more actuators with integrated servo drives.


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