Fastmicro

The Fastmicro Sample Scanner measures surface particle contamination levels indirectly using samplers. These samplers benefit the user by enabling them to take particle contamination samples at any time on various products and assemblies.

The sample Scanner even allows robust measurements in places that are difficult to reach, and on relatively rough surfaces. The samplers (as certified by partner) collect particles with >90% efficiency from different types of surfaces (metal, glass, silicon, ceramic) and roughness. Sampling does not degrade cleanliness of the sampled surface and it will not result in stains, and without significant outgassing risk.

The Sample Scanner measures the samples within seconds, which enables our customers to achieve an operator's workflow of less than a minute.

The samplers can be transported in a clean sampler holder, re-measured and further analyzed. A particle fallout upgrade option is available for measuring particle deposition with 1" witness wafers.

The Fastmicro Product Scanner has been developed to measure surface particle contamination levels directly on a product's surface. The primary applications are in semicon (pellicles, reticles, wafers) and the display market. It's fast, easy-to-operate and accurate - enabling more and earlier inspection to improve yield and save costs.

The modular Fastmicro Product Scanner can be customized to suit each production qualification process or to fit into a production line. This can include clean and automated handling, package openers for inspection and cleaning, filling stations, robot arms, an inspection spot, and a port for cleaning.

The Fastmicro module allows for a scaled inspection surface to suit the customer's needs, without introducing extra imaging time and using limited floor space.

The scanner module is also available as a white label solution for system integrators.

The Fastmicro Fallout Scanner has been developed to continuously monitor the particle deposition rate at critical locations in your cleanroom with intervals in seconds. The particle deposition rate can be accurately measured starting at particles of just 0.5 µm and the scanner can be integrated in both vacuum as well as ambient environments.

Particle deposition is one of the main mechanisms of surface contamination and therefore must be controlled to limit the degrading of critical surfaces exposed in the cleanroom. Combined with the easy-to-use software, we help our customers to monitor deposition rate instead of airborne-only, and in this way enable process quality engineers to take reliable decisions on where and how to improve cleanliness processes.

The scanner module is also available as a white label solution for system integrators.