HANBELL Vacuum Technology has adopted the harsh duty proven technology from its industry leading PD series
vacuum pumps into the iPH series semiconductor rated pumps. The iPH series pumps feature the latest in controls
with up-to-date SEMI E73 interface standard. Other features that enhance the capabilites of these pumps in harsh duty
applications include:
• Short gas path
• Integrated N2 Heater
• Power saving VFDs
• Idle mode (green mode)
• Advanced temperature control
• Multiple internal coating options
Hanbell pumps provide both increased lifecycle and decreased cost of ownership. These factors combined
with a highly competitive lead time make Hanbell an excellent choice. Highvac and Hanbell have forged a strong
working relationship to deliver this combination of service and quality to the North American market.
Patented ECOGUARD™ SGS Series Ideally suited for cluster tools with RPC
- Maintains complete separation of multiple chamber gas streams
- Available with 1, 2, 3, or 4 inlets
- PFC DRE > 99% *CF4 > 90%
- NH3 DRE > 99%
- Patented technology
- One to four inlets
- Complete separation of multiple chamber gas streams
- Burn/Wet System
- Two stage water scrubber
- Fresh water final stage
- Siemens PLC
- Touch Panel Interface
- Ideal for RPC
- Reduced downtime
- Minimal Consumables
- Ease of maintenance