GABA AWE 050 AE - WET SCRUBBER GAS ABATEMENT FOR EPI PROCESSES
Reliable: Specially designed for demanding EPI processes, powerful venturi unit, patented gas inlet clogging preventer, no trapping of by-products before abatement necessary (honey trap)
Minimal maintenance: Specially designed for demanding EPI processes, powerful venturi unit, patented gas inlet clogging preventer, no trapping of by-products before abatement necessary (honey trap)
Efficient: Proven wet scrubber technology, low operating costs, built-in water recirculation system, easy operation through PLC with color touch screen
GABA AFC 050 A - EFFICIENT FLAMELESS CATALYTIC GAS ABATEMENT
Reliable: Specially designed to reduce or remove hazardous gases and air pollutants during manufacturing processes, high temperature heater for perfect combustion without a flame
Minimal maintenance: Full swap system, modules can be exchanged without dismantling, easy servicing, fast service routine
Efficient: Combination of flameless catalytic thermal oxidation and thermal-wet gas abatement technology, treatment of combustible and soluble gases possible, high abatement efficiency, low operating costs, easy operation through PLC with color touch screen
Flameless Catalytic
These high temperature catalyst systems combine flameless catalytic themrmal oxidation and we treatment technology. Integrated into a highly efficient single system, they are designed to abate flammabel, water soluable gases and NF3, while accomodating high gas flows of up to 3,000 SLM.