The AP3000 is a next-generation ultra-high-performance probing machine designed to achieve high precision, high throughput (index move, wafer handling, and wafer alignment), low vibration and low noise.
Anti-Virus/Anti-Malware software is installed as standard software on the machine.
The functions and operability of the AP3000 are inherited from previous models, and it maintains compatibility of recipe and map data. It is very user friendly with safety and security in mind.
Options:
- Needle cleaning (cleaning wafer, or cleaning unit)
- Fan filter unit (mini-environment)
- HF jig/manipulator, Tester interface
- Loader : 2 Loader / Automation with AMHS
- Head stage tilt (Probe card tilt)
- Chuck: Ambient / Hot temp. / Low temp. /Low noise
- APC : Auto probe card exchange
- Cassette ID reading
- Wafer ID reading (Top surface / Back surface)
- GB-IB Interface
- Prober Network (Veganet, Light-Veganet, Vega-Planet, GEM)
- PCAS (Probe card auto setup)
- Probe card PGV
- PLP testing for up to 300mm square