To meet the specific requirements of our customers the following features are optionally available:
- Various substrate sizes and types supported by fully automated substrate handling incl. substrate pre-alignment
- Multipass writing
- MDSP (Mark Detection Software Package) incl. image field metric
- Layout data preparation station covering up to 256 CPU cores for:
- fracturing
- plus additional Proximity Effect Correction (PROXECCO) and fogging correction options
- Graphical User Interface (GUI) compliant to SEMI E95
- Address grid down to 1nm
The Vistec SB254 This electron-beam writer represents the evolutionary development of the successful and field-proven Vistec SB250 series. The Vistec SB254 with cell projection option for combined use with VSB principle enables further throughput improvement and a resolution below 20nm (HSQ).
Check out more information here: https://www.vistec-semi.com/products-and-services/electron-beam-system