ECM Greentech

Grenoble,  France
https://ecm-greentech.fr/
  • Booth: 259

Wafer Processing Furnaces for Semiconductors & More

Overview

ECM Greentech, ECM Group subsidiary, develops high-tech furnace systems for photovoltaic, energy storage, semiconductors, vacuum heat treatment & advanced crystal growth. Brands: ECM Greentech, Semco, Annealsys, Jipelec and Cyberstar.

ECM GREENTECH offers three ranges of furnaces: silicon ingot casting installations using directional solidification for PV silicon ingots, high temperature vacuum furnaces for heat treatment, and semiconductor furnaces (for diffusion, oxidation, doping & other processes) for wafer/cell manufacturing (up to 300mm wafers).

ANNEALSYS offers a versatile range of rapid thermal processing & direct liquid systems for research production applications in silicon/compound semiconductors. Brands: Jipelec (entry level RTP/RTA systems) & Annealsys (advanced configurations and ALD/DLI).

CYBERSTAR crystal growth equipment (Czochralski Pullers, LPE, Mirror furnaces, Bridgman, Kyropoulos, etc) are ideal for advanced crystal growth for sapphire, ruby, oxides, fluorides & other exotic materials.

Meet with Semco Technologies (ECM Group subsidiary) for your gas flow control components & e-chucks!

  Products

  • Wafer Processing Furnaces
    ECM Greentech semiconductor wafer processing furnaces are ideal for diffusion, oxidation, doping, LPCVD, PECVD, direct plasma, low RF, and other processes in wafer and cell manufacturing (Up to 300mm wafers). R&D/Lab to mass production....

    • ECM Greentech semiconductor wafer processing furnaces are ideal for diffusion, oxidation, doping, LPCVD, PECVD, direct plasma, low RF, and other processes in wafer and cell manufacturing (Up to 300mm wafers). R&D/Lab to mass production.

    DF-SERIES

    Mass production | Up to 300mm wafers

    • Batch-type production furnace
    • Up to 4 independent tubes
    • 50-400 wafers per tube
    • Diffusion, LPCVD, Oxidation

    TUBESTAR

    R&D/Small production horizontal furnace | Up to 300mm wafers

    • Batch-type tube furnace
    • 1-4 independent tubes
    • Up to 100 wafers per tube
    • Diffusion, LPCVD, Oxidation

    MEMSLAB

    R&D/Small production PECVD platform | Up to 300mm wafers

    • Batch-type PECVD furnace
    • Up to 25 wafers per batch
    • Direct Plasma, Low RF
  • SiC Batch Wafer Processing Systems
    Dedicated platforms for SiC wafer processing (4", 6", 8")....

    • Dedicated platforms for SiC wafer processing (4", 6", 8").
  • Electrostatic Chucks (E-CHUCKS)
    Semco’s Electrostatic Chucks are plug/play & available in multi-polarities, are reworkable, and have excellent thermal transfer under vacuum. Patented ESC technology provides long lifetime & high reliability. From -150°C up to 650°C....

    • Semco’s Electrostatic Chucks are plug and play and are available in multi polarities, are reworkable, and have an excellent thermal transfer under vacuum. Semco’s patented ESC technology provides long lifetime and high reliability.  Additionally, our ESCs work in a temperature range from -150°C upto 650°C, and can include embedded heaters up to 550°C.

Categories

101 Photovoltaic Device Manufacturing
  • PV: Cells
  • PV: Stand-Alone Systems
  • PV-Building-Integrated Solutions
    • 200 Packaging and Assembly Equipment
  • Solder Reflow; Soldering & Brazing Equipment
    • 205 Nanotechnology Equipment and Tools
  • Equipment, Nanotechnology Tools
    • 206 PV Equipment
  • Cells
  • Thin Film
    • 207 Process Equipment
  • Crystal Growing & Machining Equipment
  • Deposition; (CVD, PVD, ALD, Plating)
  • Epitaxy Equipment
  • Thermal Processing
    • 402 PV Systems
  • Stand-Alone Systems
    • 900 Support Products
  • Laboratory Apparatus and Supplies

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