Microtronic, Inc.

EagleView automated macro defect semiconductor wafer inspection system provides industry leading throughput, defect detection accuracy, and wafer classification for semiconductor manufacturing. EagleView systems have inspected over 400 million semiconductor wafers worldwide. The EagleView macro defect inspection tool resolves many of the problems and pitfalls of manual and micro wafer inspection by automating and standardizing semiconductor wafer inspection processes while creating complete images of every wafer in the cassette. Unlike manual micro defect wafer inspection, EagleView’s automated wafer inspection is always consistent, tireless, reliable, and fast. EagleView helps find macro defects while there’s still time to take corrective action.

EagleView provides automated macro defect detection, excursion control and wafer randomization delivering consistent and reliable results while seamlessly integrating into your existing semiconductor manufacturing environment.

EagleView combines incredible macro defect inspection throughput with state-of-the art software and analytics in an ergonomic, easy-to-use versatile platform. Operators can automatically and quickly inspect semiconductor wafers from 50mm to 450mm at a rate of over 3,000 wafers per day. EagleView configures quickly without complicated and time consuming recipe development and recipe maintenance.

ProcessGuard semiconductor wafer macro defect inspection software gives you the flexibility and control over your defect wafer inspection process by unleashing the power to customize your user interface and application features to exactly what your semiconductor wafer defect inspection production process requires.

ProcessGuard  Software running on EAGLEview is a high-throughput macro defect inspection tool that inspects 100% of manufactured semiconductor wafers. All lot wafer-to-wafer macro variations are identified and logged. ProcessGuard Software manages high resolution full-color wafer images and data from EAGLEview that provides the critical information to make immediate, cost-saving, and yield-protecting corrective decisions in the most timely manner.

The demand for wafer backside inspection has grown dramatically over the years and Microtronic added this capability to the EAGLEview automated macro inspection platform. In addition to the active side of the wafers, this innovative new option will automatically inspect wafer backsides as well. The new capability is seamlessly integrated into the existing tool’s footprint as well as the tool’s software “ProcessGuard”.

This option also includes a ProcessGuard upgrade to seamlessly view wafer frontside and backside. Lots that have the backside inspection option will be able to display Front, Back, or a composite image. ProcessGuard provides the same functionality for backside images as frontside images (Zoom, Scan Lot, etc.).