CI Semi (CI Systems Ltd)

Richardson,  TX 
United States
http://www.ci-semi.com
  • Booth: 453

In-line Wafer Temperature and Wet Chemistry Monitoring.

Overview

CI Semi, a division of CI Systems Ltd, develops, manufactures and markets process monitoring and control systems for the semiconductor, solar PV, LED and FPD markets. Active in the semiconductor process equipment market since 1992, CI offers non contact wafer temperature monitors and wet process concentration monitors to OEMs and to end users. 

CI's family of noncontact temperature monitors (the NTM line) incorporates real-time, same point emissivity measurement and compensation, making them the ideal solution for in situ process monitoring.    

CI’s family of wet process analyzers (WetSpec line)  offers cost effective solutions for in-line wet chemistry monitoring.  These range from conductivity and NDIR solutions for concentration measurement of simple chemistries, to spectroscopic systems for measuring multiple constituents and residues in complex solutions. 


  Products

  • WetSpec - In-line Chemical Concentration Analyzer
    Full line chemical concentration monitoring solutions - from single-component to complex chemical mixtures - CI Semi has the right solution!...

  • Chemical Concentration Monitors

    CI’s family of wet process concentration analyzers (WetSpec, WetRad and WetCon lines) offer cost effective solutions for in-line wet chemistry monitoring. CI's analyzers range from conductivity and NDIR solutions for the concentration measurement of simple chemistries, to spectroscopic systems for measuring multiple constituents and residues in complex solutions. Major concentration monitoring applications served by CI Semi’s products are cleaning (SC1, SC2…) etching (HF, BOE, MAI….) and photo resist strippers (EKC,  ACT, Piranha….). 

    • Available in single, dual, 4-channel and 8-channel models for maximun cost efficiency.
    • Monitor different chemical types on each channel of multi-channel analyzer.
    • Built-in (digital and analog) communications protocols for analyzer integration with tool control system.
    • In-line sampling cuts waste and environmental impact.

    Working with OEMs and fab end-users, CI's team of experienced engineers provides close support for application assessment and tool integration for our advanced monitoring systems. From requirements gathering through on-site confirmation, CI helps our customers get the job done.

    Extremely flexible in measurement capabilities, CI monitors are adaptable to operating with many chemical formulations. Ask us about your application requirements.


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