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Teksoli, Inc.

Santa Clara,  CA 
United States
http://www.teksoli.com
  • Booth: 467

Teksoli provides Technical Support for SP1 and SP2 KLA tools

Overview

Teksoli provides OEM trained expertise for SP1 and SP2 KLA equipment:

  • On-site repair
  • Level 4 Technical support
  • Preventive Maintenance
  • Spare Parts availability: PCB's, Optical assemblies
  • Consumables: Lasers, PMT's, Chucks, End-Efectors, etc.
  • System Installation 
  • SP1 and SP2 Training (SP2 at your facilities)
  • Consulting

  Products

  • EM-6129 Unpatterned Wafer defect inspection
    • 28 nm uLSE Sensitivity • Laser: 200 mW, 355nm SSL • Defect XY accuracy 12 um • Wafer throughput 125 WPH for 200 mm wafers • Open cassette stations: 150/200/300 mm • Dual Load Ports: 300/200 mm •Review station with Microscope. Real time inspection...

    • EM-6129 28 nm unpatterned Inspection Tool will be available in 2025

Categories

203 Inspection & Measurement Products
  • Defect; Particle; Contam. Detection/Review/Inspect.
  • Film Thickness; Uniformity Measurement; Ellipsometer
  • Line Width; Critical Dimension (CD) Measurement
  • Metrology; Topology; Nanotopography; Flatness; Cryst.Orient.
  • Overlay Measurement
  • Particle Monitors; Analyzers - Airborne or Liquid
  • Resistivity Measurement; 4 point probe; Sheet resistance
  • Thermal Sensing, Measurement, Analysis
    • 208 Test Equipment
  • Handlers; Positioner Systems
    • 700 Manufacturing Services
  • Measurement; Inspection Service
  • Repair; Rebuild; Install Equipment; Maintenance Svcs; Spares
    • 805 PV Services
  • Education, Training

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