AMAYA tools AMAX200, AMAX800 and AMAX1200 are the industry standard for film thickness and uniformity in impurity concentration. High through-put and the AMAX type gas dispersion head are industry leaders.
The AMAX200, AMAX800 and AMAX1200 excel at reactivity under low temperatures at atmospheric pressure. The secret is in AMAX's unique gas dispensing head that disperses SiH+, PHg, BzHo and Oz, then mixes them to attain a potent post-mix for surface reaction. This leads to greater stability in trench filling and extremely low, constant particle counts.
Now, as a customer option, SiC and ceramic can be selected for contact materials used wherever tray and wafer meet. Less metallic contact spells less contamination to product wafers.
Engineering for low TCO was core to AMAX200, AMAX800 and AMAX1200. This has been embodied in automated SiC tray / replacement which is safer and shortens maintenance time. The benefit is lower overhead and greatly reduced TCO.