Wacom Corporation

Spring Valley,  NY 
United States
https://www.m-watanabe.co.jp/en/product/
  • Booth: 768

Thank you for your interest in WACOM products.

Overview

Quartz Manufacturer and Importer / Exporter of Semiconductor Products.  Wacom Quartz manufactures process tubes, chambers, wafer carriers, crucibles and offers custom fabrication projects.  Wacom Corporation imports semiconductor spare parts.  Atmospheric and Differential Pressure Switches, Gauges, Flow Meters and LINTEC Mass Flow Controllers.  Distributor of CANON OPTRON Vacuum / Optical Coating Mateirals.  Wacom Silcone Rubber, Nisshinbo Glassy Carbon Plates, ITM Ceramic Fiber, DAEWON Chemcial Polishing Pads for Glass, Wafer and CMP.   Equipment Manufacturer of AMAYA MOCVD system with patented Vaporizer for ferroelectrics thin film deposition for mass production FeRAM and for the next generation FeRAM.  AMAYA APCVD equipment offer excellent performance and uniform film formations.  Available models combine high through-put and reduced TCO for greater profitability.  Tools - A200 (TEOS-O3/SiH4-O2 CVD System) and A6300 (Atmospheric Pressure SiH4/O2 CVD)and AMAX Series (SiH4-O2 CVD System).


  Press Releases

  • AMAYA tools AMAX200, AMAX800 and AMAX1200 are the industry standard for film thickness and uniformity in impurity concentration. High through-put and the AMAX type gas dispersion head are industry leaders. 
    The AMAX200, AMAX800 and AMAX1200 excel at reactivity under low temperatures at atmospheric pressure. The secret is in AMAX's unique gas dispensing head that disperses SiH+, PHg, BzHo and Oz, then mixes them to attain a potent post-mix for surface reaction.  This leads to greater stability in trench filling and extremely low, constant particle counts. 
    Now, as a customer option, SiC and ceramic can be selected for contact materials used wherever tray and wafer meet. Less metallic contact spells less contamination to product wafers. 
    Engineering for low TCO was core to  AMAX200, AMAX800 and AMAX1200.  This has been embodied in automated SiC tray / replacement which is safer and shortens maintenance time.  The benefit is lower overhead and greatly reduced TCO.
  • Prior to the development of the DBSAW-series of CNC diamond band saws invented by Amada, Japan, super abrasive non-metallic materials like Graphite, Sapphire, Ceramics and Quartz were being cut using Metalworking band saws.  The DSBSAW-series of CNC diamond band saws are faster and more accurate than traditional  traditional metalworking band saws by utilizing wide saw blade with diamond coated teeth, and wheel dresser similar to a CNC grinding machine to sharpen the teeth on demand.  Due to this unique sharpening method and construction of the Amada machine tools, we are able to increase the speed of the saw blade as fast as 5000 ft./min. allowing very precise and rapid cuts, limiting vibration and heat to a very minimum.  The DBSAW-series band saws allow for large raw material with a generous work envelope of L-20" x W-20" x H-20" for the DBSAW 500, and 51" x 51" x 40" for the DBSAW 1000.  The blade is supported on both side of the work envelope and cuts vertical to the work piece as opposed to the traditional angular band saws, with an output of 5HP and 15HP respectively, resulting in a smooth, clean, and rapid cut.
  • High precision Manostar products include Low Differential Pressure Gauges and Switches, Low Differential Pressure Transmitters ,Digital Low Differential Pressure Gauges and Sensors. The manostar products a used in a variety of manufacturing processes such as low differential air pressure measurements.  These products can be used in building air handling systems (air filter) management to monitoring of internal air pressure, to control of pressurized instruments, etc. These gauges are widely used in semiconductor manufacturing lines, clean rooms, and other facilities requiring this type of monitoring.

    The electronic Manostar system provides automatic computerized control of differential pressure and air volume, making it possible to reduce energy and monitoring costs.

    Low differential pressure gauges are used to monitor and control this type of air movement.  
    Yamamoto low differential digital pressure sensors are also used on semiconductor manufacturing tools. 
    Product Line includes QDP33/EMD8/EMD7.


  Products

  • Wacom Quartz
    Wacom Quartz manufactures high purity quartz products for the Semiconductor Industry. ...

  • Wacom Quartz services the Semiconductor Industry with products that include process tubes, chambers, wafer carriers, crucibles and we offer custom fabrication projects.
  • Amada
    CNC Diamond Band Saws to assist in cutting and slicing super abrasive non-metallic and minerals such as Graphite, Sapphire, Ceramics, and Quartz, which are widely used in the Semiconductor Industry. ...

  • Prior to the development of the DBSAW-series of CNC diamond band saws invented by Amada, Japan, super abrasive non-metallic materials like Graphite, Sapphire, Ceramics and Quartz were being cut using Metalworking band saws.  The DSBSAW-series of CNC diamond band saws are faster and more accurate than traditional  traditional metalworking band saws by utilizing wide saw blade with diamond coated teeth, and wheel dresser similar to a CNC grinding machine to sharpen the teeth on demand.  Due to this unique sharpening method and construction of the Amada machine tools, we are able to increase the speed of the saw blade as fast as 5000 ft./min. allowing very precise and rapid cuts, limiting vibration and heat to a very minimum.  The DBSAW-series band saws allow for large raw material with a generous work envelope of L-20" x W-20" x H-20" for the DBSAW 500, and 51" x 51" x 40" for the DBSAW 1000.  The blade is supported on both side of the work envelope and cuts vertical to the work piece as opposed to the traditional angular band saws, with an output of 5HP and 15HP respectively, resulting in a smooth, clean, and rapid cut.
     

  • Amaya APCVD Equipment
    AMAYA CO., LTD. is known for their APCVD systems used in semiconductor facilities throughout the world. APCVD ADVANTAGES: No pump units contributes to cost saving with easy maintenance. ...

  • AMAYA tools AMAX200, AMAX800 and AMAX1200 are the industry standard for film thickness and uniformity in impurity concentration. High through-put and the AMAX type gas dispersion head are industry leaders. 

    The AMAX200, AMAX800 and AMAX1200 excel at reactivity under low temperatures at atmospheric pressure. The secret is in AMAX's unique gas dispensing head that disperses SiH+, PHg, BzHo and Oz, then mixes them to attain a potent post-mix for surface reaction.  This leads to greater stability in trench filling and extremely low, constant particle counts

    Now, as a customer option, SiC and ceramic can be selected for contact materials used wherever tray and wafer meet. Less metallic contact spells less contamination to product wafers. 

    Engineering for low TCO was core to  AMAX200, AMAX800 and AMAX1200.  This has been embodied in automated SiC tray / replacement which is safer and shortens maintenance time.  The benefit is lower overhead and greatly reduced TCO.


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