Wacom Corporation

Spring Valley,  NY 
United States
https://www.m-watanabe.co.jp/en/product/

• Booth: 768

Thank you for your interest in WACOM products.

Overview

Quartz Manufacturer and Importer / Exporter of Semiconductor Products.  Wacom Quartz manufactures process tubes, chambers, wafer carriers, crucibles and offers custom fabrication projects.  Wacom Corporation imports semiconductor spare parts.  Atmospheric and Differential Pressure Switches, Gauges, Flow Meters and LINTEC Mass Flow Controllers.  Distributor of CANON OPTRON Vacuum / Optical Coating Mateirals.  Wacom Silcone Rubber, Nisshinbo Glassy Carbon Plates, ITM Ceramic Fiber, DAEWON Chemcial Polishing Pads for Glass, Wafer and CMP.   Equipment Manufacturer of AMAYA MOCVD system with patented Vaporizer for ferroelectrics thin film deposition for mass production FeRAM and for the next generation FeRAM.  AMAYA APCVD equipment offer excellent performance and uniform film formations.  Available models combine high through-put and reduced TCO for greater profitability.  Tools - A200 (TEOS-O3/SiH4-O2 CVD System) and A6300 (Atmospheric Pressure SiH4/O2 CVD)and AMAX Series (SiH4-O2 CVD System).

  Press Releases

• Amaya A200V (Jun 20, 2024)

  A200V is a single-wafer processing atmospheric pressure CVD system (APCVD system) for silicon oxide (SiO2) deposition, such as interlayer insulating deposition, passivation deposition (protective deposition), and sacrificial deposition. (Compatible with SiC wafers)

  【Features】
  ・Ideal for insulating depositions and diffusion/plasma mask depositions.
  ・Low particle film deposition by single-wafer face-down deposition.
  ・High safety and deposition stability by using a sealed chamber.
  ・Wafer warp correction function (patented) for SiC wafers.
  ・Low-load, long-cycle maintenance.
  ・Compact cabinet and adjacent installation to the mirror type for space saving.
  ・Low CoO (low running cost)

  【Applications】
  ・Interlayer dielectric deposition for power semiconductors (NSG/PSG/BPSG)
  ・Hard mask for diffusion/ion implantation, Sacrificial depositions (NSG)
  ・Passivation depositions (protective depositions, insulating depositions) (NSG)
  ・Optical Waveguide (NSG/BPSG)

• Amada CNC Diamond Band Saws (Jun 20, 2024)
  Prior to the development of the DBSAW-series of CNC diamond band saws invented by Amada, Japan, super abrasive non-metallic materials like Graphite, Sapphire, Ceramics and Quartz were being cut using Metalworking band saws.  The DSBSAW-series of CNC diamond band saws are faster and more accurate than traditional  traditional metalworking band saws by utilizing wide saw blade with diamond coated teeth, and wheel dresser similar to a CNC grinding machine to sharpen the teeth on demand.  Due to this unique sharpening method and construction of the Amada machine tools, we are able to increase the speed of the saw blade as fast as 5000 ft./min. allowing very precise and rapid cuts, limiting vibration and heat to a very minimum.  The DBSAW-series band saws allow for large raw material with a generous work envelope of L-20" x W-20" x H-20" for the DBSAW 500, and 51" x 51" x 40" for the DBSAW 1000.  The blade is supported on both side of the work envelope and cuts vertical to the work piece as opposed to the traditional angular band saws, with an output of 5HP and 15HP respectively, resulting in a smooth, clean, and rapid cut.

• Manostar Digital Sensor QDP33 (Jun 20, 2024)

  High precision Manostar products include Low Differential Pressure Gauges and Switches, Low Differential Pressure Transmitters ,Digital Low Differential Pressure Gauges and Sensors. The manostar products a used in a variety of manufacturing processes such as low differential air pressure measurements.  These products can be used in building air handling systems (air filter) management to monitoring of internal air pressure, to control of pressurized instruments, etc. These gauges are widely used in semiconductor manufacturing lines, clean rooms, and other facilities requiring this type of monitoring.

  The electronic Manostar system provides automatic computerized control of differential pressure and air volume, making it possible to reduce energy and monitoring costs.

  Low differential pressure gauges are used to monitor and control this type of air movement.  
  Yamamoto low differential digital pressure sensors are also used on semiconductor manufacturing tools. 
  Product Line includes QDP33/EMD8/EMD7.

  Products