SP3

 Deposition Area

 33 cm x 30 cm (13” x 12”) per chamber

 Power Consumption

 35 kW max per chamber

 Recipe Control

 Automatic control via discrete recipe steps

 All parameters adjustable in each step

 Datalogging and real-time display of all parameters

 Manual control for maintenance and troubleshooting

 Gas Control

 3 MFC loops standard: H₂, CH₄, N₂

 2 additional gas loops available as options

 Pressure Control

 Operating range: 6 to 50 Torr

 Downstream closed loop throttle valve control

 Temperature Monitoring

 Chamber thermocouples (3 each): 35 to 1000°C

 Filament optical pyrometer: 800 to 3000°C

 Chamber lid thermocouple: 15 to 90°C

 Filament Power

 30kW max: 200 Volts DC, 150 Amps

 Footprint

 Chamber frame 122 cm x 82 cm (48” x 32”)

 Control rack 52 cm x 97 cm (21” x 38”)

 Power distribution Box 18 cm x 51 cm x 61 cm  (7”x20”x24”)

 Height

 190 cm (74.5”) max

 Weight

 600 Kg (1320 lbs.)

 User Interface

 Graphical User interface displays system  operational status, provides system monitoring and control, data logging, and recipe development.

 Hardware Interlocks

 Equipment and personnel protected from hazardous situations related to flammable gas, high voltages, and high temperatures.

 Software Interlocks

 User controlled through Alarm/Abort Levels on analog values and status of digital alarm inputs.