Overview
Heidelberg Instruments is a world leader in the development and production of high-precision photolithography systems, maskless aligners and nanofabrication tools. The systems range from small and easy to use tabletop systems to highly complex photomask production equipment with exposure areas of several square meters. Heidelberg Instruments systems are installed in academic and industrial sites in more than 50 countries and are used in research, development and production. With over 35 years of experience and more than 1,300 systems installed worldwide, we provide lithography solutions specifically tailored to meet all our customers micro- and nanofabrication requirements for the production of 2D and complex 2.5 and 3D structures – no matter how challenging. Applications include MEMS, BioMEMS, nanotechnology, ASICS, TFT, micro-optics and others.