ESL Elektronik GmbH

Grasbrunn,  Germany
http://www.esl-elektronik.de
  • Booth: 745

ESL Elektronik Germany - service is our solution

Overview

Since 1990 ESL provides service and refurbishments for assemblies of LAM plasma etching systems and MATTSON RTP tools.
ESL is also specialized in building new RTP systems for SiC processing with graphite box handling based on MATTSON RTP technology.
We offer repairs, spare parts & inhouse and onsite service for semiconductor industry parts and products.
In our  ISO 5 cleanroom, we offer service for MFC & MFM and additionally selling UNIT, Sevenstar and AERA completes our gas technology portfolio.
High-End service made in Germany.


  Products

  • PNEUMATIC VALVE UNIT
    Pneumatic control unit for thermal processing tools . This unit has been designed to directly replace the old and obsolete PVU. It is a drop in replacement with no needed adjustments in any way. 1:1 drop in replacement...

  • A Pneumatic Valve Unit is now availble from ESL. This unit has been designed to directly replace
    the old and obsolete PVU. It is a drop in replacement with no needed adjustments in any way.
    All parts of the PVU are designed new. We have designed a less weak electronics PCB with no
    exposed parts on the backside which can cause a short or break off. We have used a highly
    reliable well used and proven valve block from a german manufacturer to only include the best
    units on the market.
  • GATE DRIVE ASSEMBLY
    Door mechanism for plasma etching tools...

  • ESL has found an alternative inner and outer door mechanism which replaces the Lam original doors for a new
    improved design. This design has a proven quality and simplified robust structure improving the lifetime of the assembly.
    The new door is designed for Form, Fit and Function to fit into the Lam loadlock without any modification. The new simplified
    door was installed in a production site for evaluation and has passed without failure. The easy to adjust alignment
    of the door adds a positive note for maintenance crews. The door is designed for high lifetime and comes with 6 months
    warranty. The Inner and the Outer door can be replaced by this single assembly, reducing inventory. The lightweight door
    is compact and handy, giving more room for maintenance and eases up installation and adjustments.

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