SPS Group B.V.

SPS-International operates as a manufacturer and stocking distributor of cleanroom process equipment, wafer handling tools, and wet chemistry and CMP consumables for the semiconductor industry, with offices in Europe, America, and Asia. The SPS team emphasizes providing customized solutions and fast supply logistics to its global customers (https://www.sps-international.com)
esPRO (https://www.esproflow.com)
Chemistry heaters, filtration, pumps, flow controllers, PFA fittings, and more for wet chemical handling
WHS (https://www.waferhandlingsystems.com)
Automation and manual wafer handling tools: wafer sorters, bulk wafer transfers, aligners, presenters, vacuum wands, and store/ship solutions
Sparetech (https://www.sparetech.com)
Spare parts and consumables: vacuum robot rebuilds, CMP membranes, pad conditioners, and upgrades for older systems
POLOS (www.sps-polos.com)
Lab equipment for R&D and universities: maskless photolithography laser writers, mask aligners, spin coaters, and hotplates

esPRO In Line Chemistry Heater
esPRO® Inline Heater uses a PFA insulated electrical resistive element heater. It is designed to safely heat acids, bases, DI water and other noncombustible liquids up to 180°C.... More Info Less Info




Create your own esPRO® Inline Heater!
The esPRO® Inline Heater uses a PFA insulated electrical resistive element heater. It is designed to safely heat acids, bases, DI water and other noncombustible liquids up to 180°C. 
This series of esPRO® Ultra-Pure Inline Heaters is designed for use in ultrapure environments and industrial fluid heating applications such as Semiconductor-, PCB-, MEMS-, Electronics-, LED-, Flat Panel-, Solar cell Manufacturing, Chemical Processing, Aerospace, Life Science industry and other applications which require the highest standards of purity. Constructed of PVDF or PFA materials, these heaters can be custom designed and built for use with deionized water, acids, and other diverse process chemistries. Our heaters are engineered and made in Germany.
Features
• High efficiency and purity
• High reliability and low maintenance
• Compact size for ease of installation
• No nitrogen purge required
• SEMI S3, CE and UL compliant
• Power range: 1.0 - 40.0 kW
• Ground wire with tantalum or platinum tip
• Various types of temperature sensors available

esPRO Immersion Heater
These compact heaters are designed to integrate easily into PVDF, PFA and quartz process tanks. They safely, evenly and efficiently heat acids, bases, DI water and other noncombustible liquids up to 180°C.... More Info Less Info




The esPRO® Immersion Heater series heats liquids at a constant temperature. They are ideal for use in the semiconductor, pharmaceutical, and biomedical industries. These compact heaters are designed to integrate easily into PVDF, PFA and quartz process tanks. They safely, evenly and efficiently heat acids, bases, DI water and other noncombustible liquids up to 180°C.
The heat source is placed in the fluid to reduce heat loss. The heater's low mass and large surface area provide the fastest temperature response time. The system also offers the most comprehensive safety package with redundant interlocks that are integrated into every system. These rugged and durable heaters come in frame designs, with outputs of 1.0 to 40.0 kW. We can arrange a wide range of custom sizes, wattages, and voltages available, please contact us for all options!
Benefits
• Ultrapure PFA (TEFLON®) wetted surfaces
• Reliable heating of harsh chemicals 
• Efficient and even, clean heating
• Maximum 180ºC heating capacity
• Compact design: Maximum power in a small footprint
• Semi S3, E and UL compliant
• Low Watt density; < 4 Watts/Inch
• Ground wire with tantalum or platinum tip
• Various types of temperature sensors available
• Over-temperature safety thermocouple on heater
• Perforated top and bottom floor grid as an option
• Heaters designed to customer specifications and process tank sizes for easy integration