DIOSEM, Inc.

Hwaseong-si,  Gyeonggi-do 
Korea (South)
http://www.diosem.com
  • Booth: 6814

Overview

Semiconductor manufacturing technology is becoming ultra-fine at the peak of the Nano process and environmental safety standards are being strengthened, which requires constant improvement and innovation in semiconductor equipment and PM.

Accordingly, since its establishment in 2012, we have provided solutions to specialized cleaning and eco-friendly scrubbers for various pollution control problems arising from semiconductor manufacturing environments using eco-friendly products.

For pollution issues in more than 20,000 semiconductor equipment, our specialized pollution control technology and cleaning solution verify 1st Pass Quality of 95% or more during PM to provide specialized cleaning services and provide alternatives to eco-friendly scrubber supply by drastically reducing harmful gases and pollutants emitted by scrubber type.


  Products

  • Plasma-Wet Scrubber
    - Swirling plasma for improved gas treatment efficiency and extended torch lifespan - PCW cooling system for torch and power supply protection - Overheating prevention system for chamber and power supply...

  • - Swirling plasma for improved gas treatment efficiency and extended torch lifespan
    - PCW cooling system for torch and  power supply protection
    - Overheating prevention system for chamber and power supply 
  • Heat-Wet Scrubber
    - Utilizing proven stability of Kanthal heaters - Increasing chamber volume to extend gas residence time - Developing chamber structures for maintenance convenience through various empirical experiences...

  • - Utilizing proven stability of Kanthal heaters
    - Increasing chamber volume to extend gas residence time
    - Developing chamber structures for  maintenance convenience  through  various empirical experiences
  • Chamber Cleaning
    1st Pass Qualification Specialized PM consulting...

  • 1st Pass Qualification Specialized PM consulting

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