Please come meet us and see our products at booth #5855
Overview
HIGHVAC Corp. - Vacuum and Abatement Solutions
HIGHVAC is a solutions provider focusing on semiconductor dry vacuum pumps and point of use abatement systems.
Please visit HIGHVAC at booth #5855 to see our EcoGuard™ burn-wet abatement system, HANBELL dry screw vacuum pump technology, and TRAPPACK Particle Traps. Choose HIGHVAC for our extensive semiconductor industry experience, personalized service, and innovative solutions.
ECOGUARD™ SGS is the first PoU abatement system that maintains complete separation of multiple chamber gas streams through the entire burn-wet process. This technology provides specific advantages for destruction of Fluorinated Green House Gases (F-GHG) and provides solutions for reducing overall Global Warming Potential (GWP) output.
HANBELL Vacuum Technology offers innovative, dry-screw, high-vacuum roughing pumps that feature robust and energy efficient screw designs with power saving electronics.
TRAPPACK utilizes an innovative electro-static filter technology which enables increased life cycle and minimal conductance loss compared to conventional filter designs.