LINTEC Co., Ltd.

Otsu,  Shiga 
Japan
http://lintec-mfc.com/
  • Booth: 465

Thank you for dropping by LINTEC during SEMICON West 2024!

Overview

As a pioneer in liquid vaporization supply systems, Lintec will continue to aim to be a development-driven company and contribute to the development of various industries.
Mass Flow Controllers (MFC) are devices that precisely control the mass flow rate of various gases and liquids used in the manufacturing processes of semiconductors, liquid crystal manufacturing, and other electronic devices. Because the flow rate of gases and liquids is controlled by mass rather than volume, the MFC can control fluids with extremely high precision without depending on temperature or pressure.
We also offer a variety of system solutions for liquid vaporization supply processes, which have been on the rise in recent years.

  Products

  • High-efficiency vaporizer VU-450 series
    Vaporizer for efficient vaporization and supply of various precursors...

    • ● High precision liquid vaporization system control with solenoid or piezo actuator
    ● This apparatus has larger vaporizing capacity than and is most suitable for high flow rate vaporization of precursors with low vapor pressure, e.g. low-k, high-k materials and various metals
    ● Rapid vaporization by spraying liquid through double orifice nozzle into vaporization chamber
    ● Long-term leak tightness ensured using metal seal

  • High Performance Digital MFC LC-3000 series
    High performance digital liquid mass flow controller with built-in piezo actuator in mass flow sensor for liquid....

    • ● Operates as a liquid mass flow controller upon installation ofp iezoelectric actuator
    ● RS-485 digital interface
    ● LINTEC's unique ambient temperature-compensated sensor incorporated
    ● Highly functional upon installation of microprocessor
    ● Diaphragm valve with small dead volume
    ● High-speed and high efficiency piezoelectric actuator
    ● Long-term leak tightness ensured using metal seal
    ● By using metal case and various filters, stable operation can be achieved through reduction of radio frequency noises and electromagnetic field interferences
  • Fast Response MFC MC-7000 Series
    MC-7000 Series: Excels in less than 200msec fast response performance using thermal sensor...

    • ● Thermal sensor provides less than 200msec fast response
    ● LINTEC's unique ambient temperature-compensated sensor allows corrosive gas and liquified gas operations
    ● Guaranteed ±1.0% S.P. flow rate accuracy
    ● Equipped with metal seal and piezoelectric actuator
    ● Available with both DeviceNetTM and EtherCAT® digital interfaces

Categories

400 Components, Parts & Accessories
  • Flow Control: Valves; Meters; Gauges; Regulators; MFC's
  • Heating elements and other Furnace components
    • 401 Sub-systems
  • Gas; Liquid delivery panels as subsystems
  • Temp. Sensing; Control; Recirculators; Chillers; Heat Exch.
    • 402 PV Systems
  • Measurement and Control Technology
    • 500 Factory Monitoring & Control Systems (FMCS)
  • Chemical; Pure Water; Fluid Handling; Storage; Supply Sys.
  • Chemical; Pure Water; Fluid Monitoring & Control Systems
  • Gas and Other Generation Systems
  • Gas Handling - Cabinets; Control; Supply Systems
  • Gas Monitoring Equipment; RGA's; TGO compliance
  • Waste Control; Effluent Management Systems
    • 501 HVAC, Temperature, Humidity, Contamination Control
  • HVAC; Temperature; Humidity Systems and Control
    • 902 Other
  • Other

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