Particle Measuring Systems, Inc.

The Ultra DI 20 Plus liquid particle counter from Particle Measuring Systems (PMS) provides groundbreaking capabilities for monitoring of the most demanding  ultrapure water systems.

Counting and sizing contaminants as small as 20 nm in combination with real-time statistical analysis enables efficient characterization of filtration systems and optimum process control.  The thermal stabilization which is designed into the UDI 20 Plus eliminates measurement uncertainty based on changing environmental conditions and provides best in class matching between multiple instruments. This allows users to easily move the unit between different locations, while maintaining consistent data and even compare results across sites globally.

Modern UPW systems achieve particle cleanliness levels that can no longer be reliably measured with previous generations of particle counting instruments. With the combination of industry leading sensitivity, lowest zero count of <50 counts/liter, high counting efficiency, and thermal stability, the UDI 20 Plus sets the standard for UPW monitoring applications.

The NanoAir 10’s size is 83% smaller than competitive condensation particle counters making it practical to use anywhere in ultra-clean environments, including inside semiconductor process tools and equipment front-end modules (EFEM). The innovative patent-pending working fluid handling system design is robust and efficient, enabling 24/7, 365 days continuous operation without the need for maintenance or user intervention of any kind between the annually required working fluid refill and calibration. Thereby, reducing sampling and data collection interruptions and tool downtime.

Additionally, the NanoAir condensation particle counter is high-pressure gas compatible with the HPD-III from PMS, and data can be viewed, analyzed, and reported using PMS Facility Net facility monitoring software or transmitted directly to third-party SCADA systems or process tool inputs.

The ParticleSeeker is a 10-port aerosol manifold companion to the NanoAir™ 10 aerosol nanoparticle counter.

Designed specifically for use in the most critical fab spaces, it is available for use in applications that require multiple sample locations to be monitored in a sequential or programmed sequence. The ParticleSeeker makes it uniquely possible to monitor inside process tool equipment Front End Module (EFEM) minienvironments. Together, the ParticleSeeker and NanoAir provide the ability to monitor up to 120m2 of fab/process space when using all 10 manifold ports.