SP3

Santa Clara,  CA 
United States
http://www.sp3-cvd.com
  • Booth: 1765

Overview

For over 20 years, sp3 Diamond Technologies pioneered the development of CVD diamond technologies. The company has developed hot-filament reactors and processes that are allowing the practical application of diamond coatings in cost effective ways.

Today, the company is comprised of a team of experts in the fields of chemistry, physics, material science and manufacturing, all of which play a role in its efforts to provide the best service and solutions to our customers.

sp3 was acquired by MAPAL in 2019 in order to become a fully integrated supplier of precision tools, whist also supplying various customers in multiple regions of differing products:

• silicon wafers

• electrodes

• CMP pad conditioners

• mechanical seals

• other various CVD diamond coating applications

A long side our CVD diamond coating services, sp3 also designs, manufactures and supply Hot Filament CVD diamond equipment.

  Products

  • 675 HFCVD - DIAMOND DEPOSITION REACTOR SYSTEM
    Enables synthesis of diamond films on a wide variety of materials. Polycrystalline diamond structure can be controlled to produce nanocrystalline or microcrystalline films, from 500nm to 50μm thick....

    • SYSTEM SPECIFICATIONS

     Deposition Area

     33 cm x 30 cm (13” x 12”) per chamber

     Power Consumption

     35 kW max per chamber

     Recipe Control

     Automatic control via discrete recipe steps

     All parameters adjustable in each step

     Datalogging and real-time display of all parameters

     Manual control for maintenance and troubleshooting

     Gas Control

     3 MFC loops standard: H2, CH4, N2

     2 additional gas loops available as options

     Pressure Control

     Operating range: 6 to 50 Torr

     Downstream closed loop throttle valve control

     Temperature Monitoring

     Chamber thermocouples (3 each): 35 to 1000°C

     Filament optical pyrometer: 800 to 3000°C

     Chamber lid thermocouple: 15 to 90°C

     Filament Power

     30kW max: 200 Volts DC, 150 Amps

     Footprint

     Chamber frame 122 cm x 82 cm (48” x 32”)

     Control rack 52 cm x 97 cm (21” x 38”)

     Power distribution Box 18 cm x 51 cm x 61 cm  (7”x20”x24”)

     Height

     190 cm (74.5”) max

     Weight

     600 Kg (1320 lbs.)

     User Interface

     Graphical User interface displays system  operational status, provides system monitoring and control, data logging, and recipe development.

     Hardware Interlocks

     Equipment and personnel protected from hazardous situations related to flammable gas, high voltages, and high temperatures.

     Software Interlocks

     User controlled through Alarm/Abort Levels on analog values and status of digital alarm inputs.

Categories

1 FLEX
  • Tools & Equipment
    • 205 Nanotechnology Equipment and Tools
  • Equipment, Nanotechnology Tools
    • 207 Process Equipment
  • Coat; Develop; Resist Processing; Track Equipment
  • Crystal Growing & Machining Equipment
  • Deposition; (CVD, PVD, ALD, Plating)
    • 308 Substrates
  • Diamond substrates
    • 700 Manufacturing Services
  • Deposition Service

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