Watty Corporation

TOKYO,  Shinagawa-ku 
Japan
http://www.watty.co.jp/en/
  • Booth: 6286

【Watty is a heater specialist for Gas line Heater. Welcome!】

Overview

We are heater specialist for Gas line Heater and Hot plate. Welcome!

We have been working in SEMI about 20 years and have lots of experience about line heating.

Heater is 100% made in Japan and 100% man made, high quality, long life time.

Please try our specious heater on your SEMI tool.

Everything we can make custom from 1 set.

【Heaters for industries】
・Hi-Watty Light
・Heat exchanger (WEX) S/M/L/SS/UL

  Products

  • Hi-Watty Light（Standard goods）
    〈 Features 〉 ・Pure Japan-made general-purpose aluminum nitride heater ・Fast heating and cooling is possible. ・Low-cost. ・Short lead time....

    • Heater structure In order to prevent any air layer from remaining inside the heater, integral sintering is performed using our proprietary production method. As a result, we have realized small heaters with large calorific values.
    Fast heating The combination of a high-melting point heating element and single-body sintering provides a heater capable of fast heating.
    Thermal shock tolerance Thermal shock tolerance is superior to alumina, used in common ceramic heaters.
    Temperature distribution By combining the high thermal conductivity of aluminum nitride (AlN) with a heater pattern design based on our know-how, uniform temperature characteristics can be realized.

    Standard goods
    Voltage (V) Power (W) Power density (W/㎠) Resistance value (at room temperature) Remarks
    □5 12 9 36 16
    □12 100 45 30 222
    200 100 70 400
    □9×34 100 70 23 143
    200 70 23 571
    □20 100 100 25 100
    200 100 25 400
    □25 100 150 24 67
    200 600 96 67 100V common
    □40 100 200 12.5 50
    200 800 50 50 100V common
    □50 100 400 16 25
    200 1600 64 25 100V common
     
  • Heat exchanger (WEX) S/M/L　High efficiency heater
    〈 Features 〉 ・Ultra high purity gas supply/heating for semiconductor/FPD manufacturing ・Optimal for supplying atmosphere gas for heat treatment furnace ・S size flow rate 10l~L size flow rate 100l, operating temperature 300°C compatible...

    • 【Heat Exchanger Features】

    1、A clean structure using only EP tubes.
    ・Contact parts such as fittings and piping are all stainless steel (SUS316L).
    ・The heated gas is heated without touching the heater surface. It is heated in a clean state while being transferred in a clean pipe.

    2、Small size, light weight and high efficiency.
    ・Making the product into a series, we have a lineup that can be used with a maximum flow rate of 100 L/min. and at up to 300°C.

    3、Thermocouple and thermostat are standard inclusions.
    ・Temperature control and consideration for overheat protection are also standard. Wiring connection is simple.

    4、Inlet/outlet joints can be changed
    ・ Standard fitting is UJR 1/4 Female size.
    ・ It corresponds to the inlet/outlet size of 1/4 to 1/2 size.

    Specification

    Type S type M type L type
    WEX-S* -2* WEX-S* -3* WEX-M* -2* WEX-M* -3* WEX-L* -3*
    Heatable fluid Inert gas
    Maximum operating temperature 200℃ 300℃ 200℃ 300℃ 300℃
    Rated flow 〜10L/min 〜50L/min 〜100L/min
    Rated capacity 130W 190W 400W 560W 1300W
    Maximum operating pressure 0.5Mpa
    Standard fitting UJR "1/4 female UJR "3/8 Female
    Gas-contacting material SUS316L (WEP specification)
    Leak rate 1 × 1010Pa・㎥/sec Less than
    Power supply AC100 or AC200
    thermocouple K type class 2
    thermostat Disk type Block type Disk type Block type Block type
    Main body dimensions（H×W×D） 75×75×98 96×102×128 125.5×100×115 155.5×130×145 178×150×165
    Body weight Approximately 1kg Approximately 1.2kg Approximately 2kg Approximately 2.3 kg Approximately 4kg
    Connection method Connector removal Lead wire 2 m Connector removal Lead wire 2 m Connector removal
    Standard accessories ※1 ※4 ※2 ※5 ※3

    ※1 Thermo / power connector x 1 K thermocouple connector x 1 Mounting bracket x 1
    ※2 Thermo / power connector x 1 K Thermocouple connector x 1 Mounting bracket x 2
  • Heat exchanger (WEX) SS/UL　High efficiency heater
    〈Features〉K thermocouple, thermostat, exterior insulation standard equipment SS：280g Lightweight and ultra-small gas heater with palm size orless Flow rate 1 to 5 L/min 250 °C UL：UL499 compatible FileNo,E478998 Flow rate 10 L/min 200 °C compatible ...

    • ＜Specification＞

    〇midget-type WEX₋SS

    ◆Size：70mm×32mm×42mm

    ※Excluding heat insulation materials and piping

    ◆Operating temperature:250°C

    ◆Rated flow rate：1~5L/Min

    ◆Rated capacity：140W(AC100Vor200V)

    ◆Temperature sensor：K thermocouple

    ◆Overheating prevention：With thermostat

    ◆Exterior insulation：Mantle(Stop with magic tape)

    ◆weight：280g

    〇WEX-UL-S2-S(UL compatible)

    ◆Size:98mm×75mm×75mm

    ◆Operating temperature：200°C

    ◆Rated flow rate：10L/Min

    ◆Rated capacity：130W

    ◆Temperature sensor： K thermocouple

    ◆Excessive temperature rise prevention:：With thermostat

    ◆Weight：1000g~

    ◆UL499 compatible　FileNo,E478998

Categories

400 Components, Parts & Accessories
  • Heating elements and other Furnace components

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