GST ABATEMENT provides eco-friendly and future sustainable products which applies the technology which neutralize and absorb water soluble & flammable gases and applied technologies that reduce carbon emissions.
In addition, by applying MTBF and full swap structure, material leakage and human errors that occur during maintenance treatment are prevented in advance, creating a safe and guaranteed FAB environment.
[MAIN PRODUCTS]
- Plasma-Wet type
- Burn-Wet type
- Wet type
- Integrated Vacuum and Abatement System