This PFCQ has a built-in linear motor which changes the valve opening by moving the valve element mounted to the linear motor, and thereby adjusting the flow rate inside the valve.
When the flow rate command signal is input to the PFCQ, the internal operation circuit performs a comparison calculation with the flow rate measured by the flow sensor. The product drives the linear motor based on that value to control the flow rate. When the linear motor is de-energized, the valve is closed by the attractive force of the permanent magnet mounted to the linear motor (Normally closed).
Flow Rate Control Change: 9 t0 300 L/min
Operational differential pressure range: 0.05 to 0.5 MPa
Time to reach the set flow rate: 0.5 seconds or less
Flow rate accuracy: ± 3% F.S.