The NanoAir 10’s size is 83% smaller than competitive condensation particle counters making it practical to use anywhere in ultra-clean environments, including inside semiconductor process tools and equipment front-end modules (EFEM). The innovative patent-pending working fluid handling system design is robust and efficient, enabling 24/7, 365 days continuous operation without the need for maintenance or user intervention of any kind between the annually required working fluid refill and calibration. Thereby, reducing sampling and data collection interruptions and tool downtime.
Additionally, the NanoAir condensation particle counter is high-pressure gas compatible with the HPD-III from PMS, and data can be viewed, analyzed, and reported using PMS Facility Net facility monitoring software or transmitted directly to third-party SCADA systems or process tool inputs.
The ParticleSeeker is a 10-port aerosol manifold companion to the NanoAir™ 10 aerosol nanoparticle counter.
Designed specifically for use in the most critical fab spaces, it is available for use in applications that require multiple sample locations to be monitored in a sequential or programmed sequence. The ParticleSeeker makes it uniquely possible to monitor inside process tool equipment Front End Module (EFEM) minienvironments. Together, the ParticleSeeker and NanoAir provide the ability to monitor up to 120m2 of fab/process space when using all 10 manifold ports.