Introducing our highest capacity 19" rackmount, thermoelectric recirculation chiller for precise temperature control of plasma etch and other semiconductor applications. Up to 3,000 watts of cooling capacity with 20C PCW, this unit has 1.5 times the capacity of our ThermoRack 1801 chiller. Operation range is -20°C to 80°C. Temperature stability/repeatability is better than ±0.05°C. Up to 50% less power consumption than compressor based chillers. Communications interfaces are available for a variety of tools, including AMAT, LAM, and Tel. Improves wafer to wafer repeatability. With only two moving parts and no compressor, this thermoelectric chiller is known for high reliability and long life. The ThermoRack 2801 reduces environmental impacts by consuming less power and using less facility water, all without the use of freon or other chemical refrigerants