ANCORP’s Multiport valve is a 1.5” high vacuum valve designed for 3-way, 4-way, or 5-way flow in demanding semiconductor and coating processes. Its modular design and configurable components enable a variety of flow patterns through the valve.
The Multiport valve consists of a cube-shaped valve body, a fully stabilized Extended Life (XL) valve stem, a fully ported ball, and end caps (body ports), all machined from corrosive-resistant 316L stainless steel. Flanged body ports or blank end caps are installed on the sides or bottom of the valve body to create a 3, 4, or 5-way valve. An L-port, T-port, or other ported ball rotates within the valve to switch flow between body ports.
FKM or FFKM O-rings seal the valve stem and end caps from atmosphere while PTFE valve seats cold flow around the ball to seal the desired body port(s) from the other body ports. The PTFE sealing surfaces are protected from direct deposition or contact with process matter, maintaining a clean, dynamic seal to prevent failure due to contamination.
Applications
The corrosive-resistant, fast-actuating design of ANCORP’s multiport valve makes it ideal for diverting, switching, combining, or splitting flow in and around reactors, traps, scrubbers, and exhaust lines on vacuum coating, etch, and abatement tools.
With a fully ported ball and minimally wetted internal components, the multiport valve resists particulate buildup and valve contamination in harsh or dirty downstream environments. 3-Way, 4-Way, and 5-way multiport valves can replace multiple 2-way valves and additional fittings on vacuum lines and manifolds.
Features and Benefits
- Patented Extended Life (XL) valve stem – stabilized stem seal eliminates atmospheric intrusion into the process line and provides high cycle life and reliable high temperature performance with FFKM O-rings
- Fully ported ball – maximum conductance with no restriction in flow path reduces particle buildup
- Evac holes on ball and blank end caps – valve interior always under vacuum, prevents virtual leaks
- Recessed fasteners and flat surfaces – improved heat transfer from heater jacket
- Faster servicing – valve stem housing can be swapped out in the field
- ISO 5211 mounting pattern – compatible with all modern valve actuators
- NAMUR VDI/VDE 3845 compliant stem detail – compatible with all modern valve position indicators